基于电路模拟的热阴极电离真空计电参数校准装置及方法  

Calibration Device and Method of Electrical Parameters of a Hot Cathode Ionization Vacuum Gauge Based on the Electrical Circuit Analogy Method

作　　者：邵壮 延峰[1,2] 王欢 董云宁[1,2] 宋瑞海 魏萌萌 卢耀文[1,2] SHAO Zhuang;YAN Feng;WANG Huan;DONG Yunning;SONG Ruihai;WEI Mengmeng;LU Yaowen(Beijing Orient Institute of Measurement and Test,Beijing 100086,China;Beijing Engineering Technology Research Center of Vacuum Measurement and Test,Beijing 100029,China)

机构地区：[1]北京东方计量测试研究所,北京100086 [2]北京市真空计量检测工程技术研究中心,北京100029

出　　处：《真空与低温》2019年第4期259-264,共6页Vacuum and Cryogenics

摘　　要：传统热阴极电离真空计的电参数校准中,必须将热阴极电离真空规与热阴极电离真空计连接并为其提供高真空环境,且校准周期普遍较长。针对该问题,提出一种等效模拟热阴极电离真空规的方法,研制了新型热阴极电离真空计电参数校准装置。该装置可单独对热阴极电离真空计的阴极电压、栅极电压、发射电流等电参数进行自动化校准,适用于无配套热阴极电离真空规情况下的校准和现场校准。解决了传统热阴极电离真空计电参数校准装置存在的问题,并为使用其他热阴极电离源真空仪器的调试提供了新思路。In the traditional electrical parameters calibration method of hot cathode ionization vacuum gauge controller,the vacuum gauges and the controllers must be connected and provided with a high vacuum environment,and the calibration cycle is long. To solve these problems,an equivalent simulation method of hot cathode ionization vacuum gauge controller is proposed,and a new calibration device for controller of hot cathode ionization vacuum gauge electrical parameters is developed. The device is used to calibrate the electrical parameters of the hot cathode ionization vacuum gauge controller,such as cathode voltage,grid voltage and emission current without vacuum gauge. The device is suitable for calibration with no matching vacuum gauge and on-site calibration. The problems of traditional electrical parameters calibration device for hot cathode ionization vacuum gauge controller are solved,and the device provides a new idea for developing other vacuum instruments using hot cathode ionization sources.

关 键 词：热阴极电离真空计 电参数 校准装置 

分 类 号：TB772.3[一般工业技术—真空技术]