毫秒激光辐照单晶硅产生燃烧波仿真及实验  

Simulation and experimentation of combustion wave generated by irradiation of millisecond laser on monocrystalline silicon

作　　者：张永祥 郭明 ZHANG Yong-xiang;GUO Ming(Commercial Branch,College of Optical and Electronical Information of Changchun University of Science and Technology,Changchun 130000,China;Institute for Interdisciplinary Quantum Information Technology,Jilin Engineering Normal University,Changchun 130052,China;Jilin Engineering Laboratory for Quantum Information Technology,Changchun 130052,China)

机构地区：[1]长春理工大学光电信息学院商学分院,长春130000 [2]吉林工程技术师范学院量子信息技术交叉学科研究院,长春130052 [3]吉林省量子信息技术工程实验室,长春130052

出　　处：《沈阳工业大学学报》2019年第5期566-570,共5页Journal of Shenyang University of Technology

基　　金：吉林省教育厅“十三五”科学研究规划项目(JJKH20190765KJ);吉林工程技术师范学院校级项目(XYB201819)

摘　　要：为了研究毫秒脉冲激光作用单晶硅产生燃烧波的动力学行为,基于流体力学理论和气体动力学理论,通过建立毫秒脉冲激光辐照单晶硅燃烧波模型对燃烧波的产生及扩展运动进行仿真.结果表明,燃烧波扩展速度幅值的最大值出现在燃烧波前端附近,主要扩展方向为逆激光入射方向的径向,激光能量密度和脉冲宽度是燃烧波扩展运动行为过程中的重要影响因素,毫秒脉冲激光作用单晶硅产生燃烧波的膨胀速度会出现二次增加现象,激光损伤效果得到增强.In order to study the dynamic behavior of combustion wave generated by the irradiation of millisecond pulsed laser on monocrystalline silicon,based on the fluid mechanics and gas dynamics theories,the generation and expansion movement of combustion wave were simulated through establishing a model for the combustion wave as mentioned above.The results show that the maximum value of expansion velocity of combustion wave appears near the front end of combustion wave,and the main expansion direction is the radial direction against the incident direction of laser.In addition,the laser energy density and the pulse width are important factors in the expansion process of combustion wave.The expansion velocity of combustion wave generated with the irradiation of millisecond pulsed laser on the monocrystalline silicon can exhibit a secondary increase,and the damaging effect of laser is enhanced.

关 键 词：毫秒脉冲 激光 单晶硅 等离子体 数值仿真 燃烧波 扩展速度 温度场 

分 类 号：TJ[兵器科学与技术]