影响微冲击片换能元性能的关键因素初探  

A Preliminary Study on the Key Factors Affecting the Performance of Micro Energy Conversion Unit of Slapper Detonator

作　　者：尹明[1] 张晶鑫[1] 王可暄[1] 周密[1] 任小明[1] 任西[1] 秦国圣[1] YIN Ming;ZHANG Jin-xin;WANG Ke-xuan;ZHOU Mi;REN Xiao-ming;REN Xi;QIN Guo-sheng(Science and Technology on Applied Physical Chemistry Laboratory,Shaanxi Applied Physics and Chemistry Research Institute,Xi’an,710061)

机构地区：[1]陕西应用物理化学研究所应用物理化学重点实验室

出　　处：《火工品》2019年第4期1-5,I0001,共6页Initiators & Pyrotechnics

基　　金：国防科技重点室基金项目(61426020205162602003)

摘　　要：采用MEMS工艺制作了微冲击片换能元,研究了桥箔、飞片、加速膛的微观形貌,并通过测试桥箔电爆性能、飞片速度和微冲击片换能元的发火性能,研究了桥箔厚度、飞片坚膜工艺、加速膛高度等对微换能元的起爆性能影响。研究表明:采用SU-8胶制作飞片、加速膛,并对飞片进行坚膜工艺处理,以及选择3.3μm厚度的桥箔和201μm高度的加速膛,可使微冲击片换能元具有更好的发火性能。In this paper,micro energy conversion unit of slapper detonator was fabricated by MEMS technology.The micromorphology of bridge foil,flyer and accelerating chamber was studied,the effects of bridge foil thickness,flyer hardbake process,and chamber height on the detonation performance of micro energy conversion unit were analyzed,through the research of bridge foil electro-detonation performance,flyer velocity test and the detonation performance test of micro energy conversion unit.The study show that by use of SU-8 resist to make flyer and accelerating chamber,and treating the flyer by hardbake process,as well as selecting 3.3μm thickness of bridge foil and 201μm height of chamber,the micro energy conversion unit would has the best detonation performance.

关 键 词：微换能元 起爆性能 微冲击片雷管 飞片 加速膛 桥箔 

分 类 号：TJ450.2[兵器科学与技术—火炮、自动武器与弹药工程]