驱动参数对串联和并联压电微泵特性影响比较研究  

Compare Analysis of Influence of Driving Conditions on Piezoelectric Micropumps Performance with Serial and Parallel Pump Chambers

作　　者：关炎芳[1] 孙百川 田勇[1] GUAN Yanfang;SUN Baichuan;TIAN Yong(School of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou Henan 450001,China)

机构地区：[1]河南工业大学机电工程学院

出　　处：《机床与液压》2019年第17期83-92,共10页Machine Tool & Hydraulics

基　　金：国家自然科学基金青年科学基金项目(51505128);河南省科技攻关项目(182102410061);河南省属高校专项科研基金项目(2015QNJH12)

摘　　要：无阀压电微泵在微流体驱动及芯片上的实验室等方面有着广泛的应用。为了比较串联、并联无阀压电微泵性能差异,采用玻璃湿法腐蚀工艺,以玻璃为基体,制造出含有串联、并联腔体结构压电微泵,并采用聚二甲基硅氧烷(PDMS)对微泵进行封装,两种微泵泵腔和扩张/收缩微流道尺寸相同。设计出不同驱动信号波形、电压、相位、占空比和对称性组合,并将不同驱动方式组合应用于两种微泵的流量和压力性能测试。结果显示:驱动条件对两种微泵性能有较大影响;两种微泵的流量和压力随着驱动电压升高均呈现增大趋势;三角波驱动条件下两种微泵性能优于正弦波和方波驱动;驱动波形相位、占空比和对称性对串联微泵性能的影响较并联微泵大。试验同时得出:P1和P2两个腔体在正弦-正弦信号组合驱动下,串联微泵的流量和压力值在相位差为±180°时达到最大;并联微泵则在相位差为0°时达到最大,与并联和串联微泵结构及工作原理相一致;所有驱动条件组合下,并联微泵性能优于串联微泵。试验测得并联微泵的最大流量和压力分别为173μL/min和490.8 Pa,串联微泵的最大流量和压力分别为83.1μL/min和190.3 Pa。Valveless piezoelectric micropumps have wide applications in microfluidics and lab-on-a-chip devices.In this study,piezoelectric micropumps with serial and parallel pump chambers were fabricated and comprehensively characterized.These pumps were made using a wet etching technique on a glass substrate.The dimensions of the pump chamber and diffuser/nozzle elements were the same in both configurations.The flow rates and pressures were measured for different combinations of driving signals,voltages,phases,duty ratio and symmetrical characteristic.The results show that the overall pumping performance is heavily dependent on driving conditions.Specifically,the flow rates and pressures of both micropumps increase with increasing driving voltage,and a triangle driving signal outperforms sine and square signals.It is also found that the influence of the driving signals phase,duty ratio,symmetrical characteristic on the parallel micropump is greater than that on the serial micropump.The flow rate and pressure of the serial micropump both reach their maximum values at a phase difference of±180°with a sine-sine signal combination for the two chambers;to the parallel micropump,the phase difference is 0°.This is consistent with the working principle of the serial micropump.Overall,the performance of the parallel micropump is better than that of the serial micropump for all combinations of driving parameters.The maximum flow rate and pressure are 173μL/min and 490.8 Pa respectively for the parallel micropump and 83.1μL/min and 190.3 Pa respectively for the serial micropump.

关 键 词：微流体 微泵 驱动参数 性能比较 

分 类 号：TH302[机械工程—机械制造及自动化]