一种用于称重的矩形微通道式微悬臂梁  

Micro Cantilever with Rectangular Microchannel for Weighing

作　　者：郝秀春[1] 蒋纬涵 Hao Xiuchun;Jiang Weihan(School of Mechanical Engineering,Jiangsu University,,Zhenjiang 212013,China)

机构地区：[1]江苏大学机械工程学院

出　　处：《微纳电子技术》2019年第10期806-810,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51575248)

摘　　要：矩形微通道式微悬臂梁传感器可用于检测单个微粒子或细胞的质量,在生物和化学等领域具有非常广泛的应用前景。设计了一种含有矩形微通道的微悬臂梁结构,建立了单个微粒子等效的集中载荷在微悬臂梁中矩形微通道的任意位置时弯曲挠度的理论模型,分析了静态工作模式下的弯曲挠度变化以及研究了单个微粒子的质量及位置对微悬臂梁的弯曲挠度的影响,并用COMSOL Multiphysics仿真软件对矩形微通道式微悬臂梁的弯曲变形进行仿真计算,弯曲挠度的仿真结果与理论计算结果相对误差为1.2%。实验验证了在聚甲基丙烯酸甲酯(PMMA)微粒子的作用下,微悬臂梁的最大弯曲挠度为2.741μm。The micro cantilever sensor with rectangular microchannel can be used to detect the mass of a single microparticle or cell,and has a very wide application prospect in biology,chemistry and other fields.A micro cantilever structure with rectangular microchannel was designed.A theoretical model of the bending deflection of a rectangular microchannel at any position in a cantilever beam under the equivalent concentrated load of a single microparticle was established.The variation of bending deflection under static working mode was analyzed and the influences of the mass and position of a single microparticle on the bending deflection of the micro cantilever were studied.The COMSOL Multiphysics simulation software was used to simulate and calculate the bending deformation of the micro cantilever with rectangular microchannel.The relative error of bending deflection between the simulation results and the theoretical results is 1.2%.The experiment verifies that the maximum bending deflection of the micro cantilever is 2.741μm under the action of a polymethyl methacrylate(PMMA)microparticle.

关 键 词：微悬臂梁 矩形微通道 微粒子 集中载荷 弯曲挠度 

分 类 号：TH703[机械工程—仪器科学与技术]