不同电极数石英谐振器集群力敏特性分析  

Force sensitive characteristics of quartz resonators cluster with different number of electrodes

作　　者：田文杰[1] 陈福彬[1] 佟盟 冯洁[2] TIAN Wenjie;CHEN Fubin;TONG Meng;FENG Jie(Sensor Key Laboratory,Beijing University of Information Science and Technology,Beijing 100101,China;School of Physics and Electronic Information,Yunnan Normal University,Kunming 650500,Yunnan,China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]云南师范大学物理与电子信息学院,昆明650500

出　　处：《中国惯性技术学报》2019年第4期516-523,共8页Journal of Chinese Inertial Technology

基　　金：北京市自然科学基金重点项目（KZ201511232037）;云南省科技计划项目（2016FB108）;现代控制技术教育部重点实验室（北京信息科技大学）基金项目

摘　　要：为了提高石英力敏谐振器的力-频转换系数,根据石英晶体压电效应及各向异性特性,利用Matlab数值计算方法,研究了径向力作用时AT切石英晶体薄圆片内各点的应力分布特点,设计了不同基频及不同电极数的石英力敏谐振器集群,并对其力敏特性进行了测试。结果表明:谐振器的力敏特性与谐振器的谐振频率、电极位置及力作用方位有关;集成于同一晶体基片不同位置的谐振器谐振频率作差频处理,得到的差频信号仍具有显著的力敏特性,同时差频信号中材料自身干扰因素的影响得到了抑制;在非耦合状态下,同一晶体基片上电极集成数越多,差频组合形式越多,得到的叠加信号的力敏特性越显著;经差频及叠加处理,集成式石英六电极谐振器的力-频转换系数可达8655.8 Hz/N。这种结构的力敏谐振器可用于高稳定的数字式力传感器及相关姿态检测控制系统。To improve force-frequency conversion coefficient of quartz resonator,the stress distribution characteristics of various points in the AT-cut quartz crystal thin wafer during the action of radial force are analyzed by MATLAB numerical calculation based on the piezoelectric effect and anisotropic property of quartz crystal.A cluster of quartz force sensitive resonators with different base frequency and different number of electrodes is designed,and its force-sensitive properties are tested and compared.The results show that the force-sensitivity characteristics of the resonator are related to the resonant frequency,electrode position and force azimuth,and the beat frequency signals from the resonators integrated at different positions of the same crystal substrate still have significant force-sensitive characteristics and can effectively suppress the influence of material interference factors.In the uncoupled state,the more the number of electrodes integrated on the same crystal substrate,the more the different frequency combination forms,and the more significant the force sensitivity of the superimposed signal.After frequency superposition,the force-frequency conversion coefficient of the integrated quartz six-electrode resonator can reach 8655.8 Hz/N.The force-sensitive resonator of this structure can be used for high-stability digital force sensors and related attitude detection control system.

关 键 词：石英力敏谐振器集群 力敏特性 数值计算 应力分布 姿态检测 

分 类 号：O765[理学—晶体学] TM229.1[一般工业技术—材料科学与工程]