HIT太阳电池衬底形貌修饰及其应用研究  

Surface Morphology Modification and Its Application on HIT Solar Cell

作　　者：李政宏 叶晓军[1] 杨宁[1] 袁晓[1] 柳翠[1] 李红波[1] LI Zheng-hong;YE Xiao-jun;YANG Ning;YUAN Xiao;LIU Cui;LI Hong-bo(School of Materials Science and Engineering,East China University of Science and Technology,Shanghai 200237,China)

机构地区：[1]华东理工大学材料科学与工程学院

出　　处：《人工晶体学报》2019年第9期1667-1672,共6页Journal of Synthetic Crystals

基　　金：标定用双面太阳电池制备技术研究(17DZ1201102)

摘　　要：在HIT太阳电池非晶硅沉积过程中,单晶硅衬底的绒面金字塔沟壑处易发生外延生长,影响电池输出性能。采用碱性体系(NaClO溶液)对硅片进行绒面形貌修饰,在NaOH的各向异性刻蚀和NaClO的氧化作用下,金字塔结构由尖锐的四面体向较圆滑的“锥形”转变,尤其金字塔底部变得平滑。随着形貌修饰时间的增加,样品表面平均反射率呈线性增大,从未修饰样品的12.48%升高至13.79%,钝化后硅片少子寿命显著提升,绒面形貌修饰有效改善了界面钝化质量,中长波外量子效率提升,从而实现电池电性能的提升。样品绒面形貌修饰45 min后,开路电压从656.3 mV升高至699.8 mV,转换效率提高1.8%。此外,研究了反应温度对表面形貌修饰及HIT太阳电池性能的影响,基于70℃、10%NaClO溶液、45 min的绒面修饰条件下制备的HIT太阳电池转换效率达到最高,为12.02%。Epitaxial growth is likely to occur in the gully regions of texture pyramids of monocrystalline silicon during the deposition of amorphous silicon in HIT solar cells,which affects the output performance of cells.In this work,alkaline system(NaClO solution)was used to modify the textured surface morphology of silicon wafers.Under the anisotropic etching of NaOH and the oxidation of NaClO,the pyramids change from sharp tetrahedron to smoother taper.Typically,the bottom of the pyramids becomes smoother.The average reflectivity of silicon surface increases lineaerly with the increase of surface modification time,which changes from 12.48%to 13.79%.After passivation,the lifetime of the minority carriers is obviously improved,meanwhile,the modification also ameliorates the interface passivation quality effectively.The external quantum efficiency in the middle and long wave region is improved,thus achieving an improvement of electrical performance.After the sample was modified for 45 min,the open circuit voltage increases from 656.3 mV to 699.8 mV,and the energy conversion efficiency increases by 1.8%.Further more,the effects of reaction temperature on surface morphology modification and HIT solar cell performance were systematically studied.It is found that under the textured surface modification condition of 70℃,10%NaClO solution and 45 min,the energy conversion efficiency of the HIT solar cells reaches the highest of being 12.02%.

关 键 词：HIT太阳电池 形貌修饰 NACLO 绒面 钝化 

分 类 号：TM914.4[电气工程—电力电子与电力传动]