三向力作用下石英晶块应力分布及力传感研究  

Study on Stress Distribution and Force Sensing of Quartz Block Under Action of Three-Dimensional Force

作　　者：任宗金[1] 刘帅 张军[1] 赵毅 REN Zongjin;LIU Shuai;ZHANG Jun;ZHAO Yi(School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院

出　　处：《压电与声光》2019年第5期661-665,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51675084,51475078);航空科学基金资助项目(20160163001);中央高校基本科研业务基金资助项目(DUT17GF211)

摘　　要：针对当前压电三向力传感器采用多片叠堆而存在定位难、制作过程复杂的问题,该文提出了一种以立方体石英晶块作为力敏元件的新型压电三向力测试装置。对空间三向力作用下压电石英晶块表面应力分布规律进行研究,由压电效应“力-电”转换公式建立各表面应力与感生电荷密度的数学模型。在得到特定面域内电荷量与三向力间映射关系的基础上,完成了新型压电三向力测试装置的结构设计,并进行了静态标定实验。实验结果表明,该新型压电三向力测试装置的线性度为1.39%,重复性为4.52%,向间干扰为5.02%,说明利用石英晶块也可实现三向力测量。Aiming at the problems that the current piezoelectric three-dimensional force sensor has difficulty in positioning and complicated manufacturing process due to adopting multiple stacks,a novel piezoelectric three-dimensional force test device with cubic quartz crystal blocks as force sensitive components is proposed.The surface stress distribution law of piezoelectric quartz block under the action of three-dimensional force loading is studied.The mathematical model between surface stress and induced charge density is established according to the“force-electric”conversion formula of piezoelectric effect.The structure design of the novel piezoelectric three-dimensional force test device is completed and the static calibration experiments are carried out based on obtaining the mapping relationship between the amount of charge in a specific area and the three-dimensional force.The results show that the linearity of the novel piezoelectric three-dimensional force test device is 1.39%,the repeatability is 4.52%,and the crosstalk is 5.02%,which indicates that the quartz crystal block can also measure three-dimensional force.

关 键 词：三向力测量 压电效应 石英晶块 分区面域 解耦 

分 类 号：TN304[电子电信—物理电子学] TH823[机械工程—仪器科学与技术]