尺蠖型压电驱动器结构及其特性  

Structure and Characteristics of Piezoelectric Inchworm Actuator

作　　者：华顺明 曹旭[2] 王义强 刘立君 李继强 HUA Shunming;CAO Xu;WANG Yiqiang;LIU Lijun;LI Jiqiang(College of Mechanical and Energy Engineering,Ningbo Institute of Technology,Zhejiang University,Ningbo 315100,China;Institute of Manufacturing Technology and Equipment Automation,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学宁波理工学院机电与能源工程学院,浙江宁波315100 [2]浙江大学制造技术及装备自动化研究所,浙江杭州310027

出　　处：《压电与声光》2019年第5期694-699,705,共7页Piezoelectrics & Acoustooptics

基　　金：浙江省自然科学基金资助项目(LY16E050009);宁波市自然科学基金资助项目(2017A610091)

摘　　要：由于微纳米级精密定位技术在原位测试、精密光学、超精加工等领域的作用无可替代,因此具有精密定位功能的各种新型驱动器受到国内外学者的广泛关注,其中尺蠖型压电驱动器的研究尤为活跃。该类驱动器定位精度高,结构紧凑,输出力大,运动稳定,具备较大工作行程的同时拥有较高的运动分辨率,在各类驱动器中综合优势明显。首先,介绍了尺蠖型压电驱动器的原理和关键部件;其次,对直线型、旋转型和一体型三类代表性尺蠖驱动器的研究进展进行了总结和归纳,分析了各自的主要结构、动作原理、性能特点和适用场合。结果表明,实用性问题是未来研究重点,可从构型设计、控制系统、补偿算法以及温度控制等方面加以改进。Because the precise positioning technology with micro/nanometer resolution plays an irreplaceable role in in-situ testing,precision optics,ultra-precision processing and other fields,various new actuators with precise positioning functions have been attracted wide attention of both domestic and foreign scholars,especially piezoelectric inchworm actuators.They bear obvious comprehensive advantages among all actuators,such as high positioning accuracy,compact structure,large output force,stable motion,large working stroke and high motion resolution.Firstly,the principle and key components of piezoelectric inchworm actuator are introduced.Secondly,the research progress of three representative inchworm actuators(i.e.,linear,rotary and integrated)are summarized,and their main structures,action principles,characteristics and applications are analyzed.The results show thatpracticality is the key issues of future research,which can be implemented from the aspects ofconfiguration design,control system,compensation algorithm and temperature control,etc.

关 键 词：微纳传动 精密定位 大行程 压电陶瓷 尺蠖直线驱动器 尺蠖旋转驱动器 直线旋转一体化尺蠖旋转驱动器 

分 类 号：TM359.9[电气工程—电机] TH139[机械工程—机械制造及自动化]