基于有限元法的激光等离子体诱导玻璃损伤特性研究  

Research on Laser Damage Induced by Laser Plasma Based on Finite Element Method

作　　者：于慧波 姜越 沈雄 冯国英[1] 郑洲 贾曜峰 韩敬华[1] YU Hui-bo;JIANG Yue;SHEN Xiong;FENG Guo-ying;ZHENG Zhou;JIA Yao-feng;HAN Jing-hua(Institute of Laser&Micro/Nano Engineering,College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China;Institute of Chemical Materials,Chinese Academy of Engineering and Physics,Mianyang,Sichuan 621900,China)

机构地区：[1]四川大学电子信息学院激光微纳工程研究所,成都610065 [2]中国工程物理研究院化工材料研究所,四川绵阳621900

出　　处：《光子学报》2019年第10期179-186,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(No.u1730141);四川省科技厅重点研发项目(No.2018FZ0032);中国工程物理研究院横向课题(No.HG2018132)~~

摘　　要：研究了熔石英玻璃元件在纳秒激光等离子体冲击波作用下的表面和横截面损伤形貌,利用有限元法模拟了冲击波在熔石英玻璃内部的传播规律,并基于冲击波在玻璃内部的应力分布规律分析了损伤形成机理.研究发现:在冲击波作用下,石英玻璃会受到沿波面方向的压应力和沿波面切方向的拉应力,在这两种力的作用下,造成以激光辐照中心的弧状层状断裂和沿径向的断裂;冲击波的反射叠加还会使局部拉应力增大,造成靠近后表面的损伤.有限元法能够直观地分析等离子体冲击波对光学元件的作用,并分析光学元件在等离子体冲击波下的损伤机理.The surface and cross-section damage morphology of fused silica glass elements under the action of nanosecond laser plasma shock waves was investigated.We use the finite element method to simulate the propagation law of shock wave inside fused silica glass,and analyze the damage formation mechanism based on the stress distribution law of shock wave inside glass.It is found that under the action of shock wave,the fused silica glass will be subjected to compressive stress along the wave front direction and tensile stress along the wave front direction.These two stresses cause arc-like layered fracture and radial fracture at the center of the laser irradiation.The superposition of the reflection of the shock wave causes the local tensile stress to increase,which caused damage to the rear surface.Through the finite element method,we intuitively analyzed the effect of plasma shock wave on optical components,and analyzed the damage mechanism of optical components under plasma shock waves.

关 键 词：激光诱导损伤 激光等离子体 冲击波 熔石英玻璃 有限元分析 

分 类 号：TN244[电子电信—物理电子学]