二氧化硅纳米球辅助制备n^+发射极太阳电池性能研究  

Preparation and Performance of n+ Emitter Solar Cells by SiO2 Nanospheres Assisted Liquid Phosphorus Diffusion

作　　者：顾浩 沈鸿烈 刘连峰 陈春明 王明明 任学明 李琰琪 GU Hao;SHEN Honglie;LIU Lianfeng;CHEN Chunming;WANG Mingming;REN Xueming;LI Yanqi(College of Materials Science and Technology,Jiangsu Key Laboratory of Materials and Technology for Energy Conversion,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;Yangzhou Xinjing Photovoltaic Technology Co.,Ltd,Yangzhou Jiangsu 225600,China)

机构地区：[1]南京航空航天大学材料科学与技术学院,江苏省能量转换材料与技术重点实验室,南京210016 [2]扬州鑫晶光伏科技有限公司,江苏扬州225600

出　　处：《电子器件》2019年第5期1090-1094,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(61774084);江苏省前瞻性联合研究项目(BY2016003-09);江苏省科技成果转化专项资金项目(BA2017032)

摘　　要：为了解决旋涂磷源扩散制备发射极片内均匀性差的问题,采用在磷酸溶液中添加二氧化硅纳米球方法,结合旋涂热扩散形成n+发射极并制作了太阳电池。结果表明:添加纳米球磷扩散后,样品的均匀性从86.0%提升到96.8%,增加了表面掺杂浓度和少子寿命。太阳电池的电致发光(EL)测试表明电池的EL图像亮度也更高更均匀。未添加纳米球扩散中心位置的电池效率为14.25%,边缘效率为8.36%;添加纳米球后中心位置效率为17.04%,边缘效率为16.57%,填充因子由48%提升到78%。In order to improve the uniformity of the n+emitter prepared by phosphorus spin-on doping(SOD),a new method by adding SiO 2 nanospheres into phosphoric acid solution to make phosphorus source is proposed.After SOD,the n+emitter was fabricated by thermal diffusion and then the solar cells were fabricated by industrialized process.The experimental result showed that the diffusion uniformity increased from 86.0%to 96.8%.The doping concentration and minority carrier lifetime also increased and the electroluminescence(EL)results depicted that the EL images of solar cells with SiO 2 diffusion had higher brightness and uniformity compared with that produced without addition of SiO 2 nanospheres.Solar cell efficiency test demonstrated that the efficiency in sample center prepared by phosphorus source mixed without SiO 2 was 14.25%,while that in sample edge was 8.36%.In contrast,the efficiency in sample center prepared by phosphorus source mixed with SiO 2 was 17.04%,while that in sample edge was 16.57%.The filling factor also increased from 48%in sample without SiO 2 nanospheres to 78%in that with SiO 2 nanospheres.

关 键 词：太阳电池 SIO 2纳米球磷扩散 旋涂后热扩散 均匀性 发射极 

分 类 号：TM914.4[电气工程—电力电子与电力传动] TN304[电子电信—物理电子学]