铌酸锂波导质子交换温度控制及折射率分布研究  

Study on Proton-Exchange Temperature Control and Refractive Index Distribution of Lithium Niobate Waveguide

作　　者：宋凝芳[1] 戴念 宋镜明[1] 刘嘉琪 SONG Ningfang;DAI Nian;SONG Jingming;LIU Jiaqi(School of Instrumentation Science and Opto-Electronics Engin.,Beihang University,Beijng 100191,CHN)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院

出　　处：《半导体光电》2019年第5期655-660,共6页Semiconductor Optoelectronics

基　　金：国家重大科学仪器设备开发专项项目(2013YQ040877)

摘　　要：针对铌酸锂波导质子交换的精确控制提出了一种预热-反应方法,建立了质子交换温控模型,并对该模型进行了PID控制参数整定和温度波动误差分析,在此基础上研究了质子交换过程中温度波动对H+浓度纵向分布的影响。采用预热-反应方法制作了波导样本,实验测试了其折射率纵向分布,并与传统工艺制作的波导样本测试结果进行对比,验证了所提方法对质子交换精确控制的有效性。实验表明:预热-反应方法折射率分布同理论计算折射率分布结果吻合更好。A preheating-reaction method was proposed for the precise control of protonexchange process of lithium niobate waveguides,and a temperature control model was established.Analysis was performed on the PID control parameter setting and temperature fluctuation error of the proton-exchange temperature control model.The effect of temperature fluctuations during the proton-exchange process on the longitudinal distribution of H+concentration was investigated.The waveguide sample was fabricated with the preheatingreaction method,and the longitudinal distribution of the refractive index was tested.The results were compared with those of the conventional waveguide samples to verify the effectiveness of the method for proton-exchange control.

关 键 词：铌酸锂波导 PID温度控制 质子交换 H+浓度纵向分布 折射率纵向分布 

分 类 号：TN252[电子电信—物理电子学]