不同粒径CuBr对高灵敏快响应室温NH3气体传感器的影响  

Effect of CuBr Materials with Different Particle Sizes on High Sensitivity and Fast Response Roomtemperature NH3 Sensors

作　　者：刘继江 刘志远 刘玺 王洋洋 咸婉婷 杨思远 LIU Ji-jiang;LIU Zhi-yuan;LIU Xi;WANG Yang-yang;XIAN Wan-ting;YANG Si-yuan(The 49th Research Institute,China Electronics Technology Group Corporation,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司第四十九研究所

出　　处：《传感器世界》2019年第10期7-14,共8页Sensor World

摘　　要：采用真空热沉积法,通过Ar气体保护和调整陶瓷基底与蒸发源的距离,在陶瓷基底上制备出可室温工作的两种不同粒径大小的Cu Br NH3传感器。材料表征结果显示,所制备的Cu Br是平均粒径约为4μm和2μm纯相材料。对不同粒径Cu Br传感器进行0.5ppm^10ppm的NH3测试,结果表明,对于10ppm的NH3,2μm粒径传感器的灵敏度比4μm粒径传感器的灵敏度高出3倍,也比一些以其它方法制备的Cu Br传感器、半导体和聚合物传感器具有更高的氨气灵敏度,而且6s/25s的响应/恢复时间也比它们高2~3个数量级。2μm粒径Cu Br NH3传感器的高灵敏和快响应归因于敏感材料Cu Br的小粒径和多孔性。Room-tem perature NH3 sensors based on two CuBr materials with different particle sizes are are fabricated by vacuum thermal evaporation on ceramic substrates by Ar gas shielding and distance adjusting between ceramic substrates and evaporating sources.The characterization results show that as-fabricated CuBr materials are pure phase with average particle size of about 4μm and 2μm respectively.The real-time response properties of two CuBr sensors are tested when exposed to 0.5ppm?1Oppm NH3 at room tem perature.The test results show that the sensitivity of 2μm particle size CuBr sensor is 3 times higher than that of 4μm particle size CuBr sensor in 1Oppm NH3,and also has higher sensitivity than other CuBr NH3 sensors with different preparation methods,semiconductor and polymeric compound sensors.Moreover,the 6s/25s response/recovery time of 2μm particle size CuBr sensor is about 2-3 orders of magnitude higher than those of above sensors.The high sensitivity and fast response of particle size CuBr sensor are attributed to small particle size and porosity of sensing material.

关 键 词：氨气传感器 溴化亚铜 粒径 灵敏度 响应/恢复时间 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]