一种用于陶瓷基板烧结的洁净车昆道炉的研制  

Development of a Lustration Roller Kiln for Sintering Ceramic Substrates

作　　者：汪训浪 周伟清 朱常奇 WANG Xun-lang;ZHOU Wei-qing;ZHU Chang-qi(Hengli Eletek Co.,Ltd of No.43 Research Institute of CETC,Hefei 230088,China)

机构地区：[1]合肥恒力装备有限公司,安徽合肥230031

出　　处：《混合微电子技术》2018年第3期88-92,共5页Hybrid Microelectronics Technology

摘　　要：通过电子陶瓷行业空气幌道炉的研制,该窑炉针对炉体结构、炉膛材料和结构、传动系统、气氛系统以及电气控制系统多个方面进行了优化和改进,从而满足高温度、高平稳、高洁净度的电子陶瓷行业烧结工艺要求。Based on the research of air roller kiln in the industry of electronic ceramics,the frame structure,chamber of kiln,transmission system,atmosphere system and electric control system have all been optimized and improved to satisfy the sintering requirements for high temperature,excellent stability and high lustration grade environment.

关 键 词：电子陶瓷 高温棍道炉 洁净棍道炉 

分 类 号：TB472[一般工业技术—工业设计]