Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV  

作　　者：Chun Guo Bin-Cheng Li Ming-Dong Kong Da-Wei Lin 郭春;李斌成;孔明东;林大伟(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;Key Laboratory of Optical Engineering,Chinese Academy of Sciences,Chengdu 610209,China;School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China [2]Key Laboratory of Optical Engineering,Chinese Academy of Sciences,Chengdu 610209,China [3]School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China [4]University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Chinese Physics B》2019年第11期349-353,共5页中国物理B（英文版）

基　　金：Project supported by the West Light Foundation of the Chinese Academy of Sciences;the National Natural Science Foundation of China(Grant No.61805247)

摘　　要：Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet(VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics(reflectance), structure(surface morphology and crystalline), and environmental durability(humidity test) are characterized and discussed. The results show that both optical and moistureresistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet（VUV） applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics（reflectance）, structure（surface morphology and crystalline）, and environmental durability（humidity test） are characterized and discussed. The results show that both optical and moistureresistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

关 键 词：protected-Al mirrors reflectance VACUUM ULTRAVIOLET MGF2 

分 类 号：O48[理学—固体物理]