用于硫化氢快速检测的声表面波传感器设计  

Design of Surface Acoustic Wave Sensor for Rapid Detection of Hydrogen Sulfide

作　　者：刘雪莉 张玉凤 梁勇[1] 李俊红[1] 王文[1] LIU Xueli;ZHANG Yufeng;LIANG Yong;LI Junhong;WANG Wen(Research Center for Ultrasonics and Technology,Institute of Acoustics of Chinese Academy of Sciences,Beijing 100190,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院声学研究所超声技术中心,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京101408

出　　处：《郑州大学学报（工学版）》2019年第6期43-46,共4页Journal of Zhengzhou University（Engineering Science）

基　　金：国家自然科学基金资助项目(11774381)

摘　　要：将三乙醇胺针对硫化氢(H2S)的特异选择性吸附与声表面波传感技术的快速与高灵敏响应特点相结合,提出了一种基于声表面波的硫化氢快速检测技术.利用滴涂方法实验制备了在声表面波传播路径表面沉积三乙醇胺的延迟线型传感器件,并结合差分鉴相电路,研制出新型SAW硫化氢气体传感系统样机.实验结果表明:所研制的声表面波硫化氢传感器具有快速响应(≤29.9 s)、高灵敏度(2.81 mV·mg^-1·m^3)和较低的检测下限(0.21 mg/m^3)的特点,在硫化物快速监测应用领域具有良好的应用前景.In this contribution,a surface acoustic wave(SAW)based H2S sensor was proposed for by combining the SAW technology with fast response and TEA with selective absorption towards H2S.By means of the drop-coating method,a 200 MHz SAW H2S sensing device with delay line configuration was developed,and collected into the differential phase discrimination circuit,and the corresponding SAW H2S sensor system was constructed.The measured results in H2S gas experiments indicated that fast response(≤29.9 s),high sensitivity(2.81 m V·mg^-1·m^3)and lower detection limit(0.21 mg·m^-3)were achieved.It seemed that the proposed SAW sensor could be promising for sulfide sensing.

关 键 词：声表面波 三乙醇胺 延迟线 鉴相器 硫化氢传感器 

分 类 号：TN384[电子电信—物理电子学]