激光辐照六方氮化硼陶瓷等离子体光谱特性研究  

Study on Plasma Spectral Characteristics of Hexagonal Boron Nitride Ceramics Irradiated by Pulsed Laser

作　　者：侯力铭 张喜和[1] 蔡红星[1] 石晶[1] 蔡鹏程[1] HOU Li-ming;ZHANG Xi-he;CAI Hong-xing;SHI Jing;CAI Peng-cheng(School of Science,Changchun University of Science and Technology,Changchun 130022)

机构地区：[1]长春理工大学理学院

出　　处：《长春理工大学学报（自然科学版）》2019年第5期5-8,12,共5页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金青年基金（41404109)

摘　　要：在大气环境中利用Nd:YAG脉冲激光器(波长为1064 nm、脉宽为15 ns、重复频率为1 Hz)的脉冲激光能量密度为16.6 J/cm^2辐照六方氮化硼材料,通过测量得到大气环境中的六方氮化硼的等离子体发射光谱,证明在该实验条件下,激光能量足够使氮化硼靶材电离。在进行等离子体光谱对比分析中,去除了大气等离子体发射谱线的干扰,分离出了六条六方氮化硼发射光谱特征谱线,并对其特征峰进行了指认。实验结果表明:N Ⅱ 393.55 nm和N Ⅱ 423.29 nm两条特征峰为六方氮化硼材料的等离子体发射光谱谱线。在局部热平衡条件下,选择B Ⅰ 208.17 nm和B Ⅰ 250.49 nm两条谱线,利用上述所选择特征谱线的相对强度,通过玻尔兹曼双谱线法计算得到电子温度为19202 K。利用测得的B Ⅰ 250.49 nm谱线附近的曲线进行Lorentz曲线拟合,得到拟合后谱线的半高全宽(FWHM)为3.08933 nm,根据斯塔克展宽法推得等离子体的电子密度为2.4×10^17 cm^-3。Hexagonal boron nitride materials are irradiated by Nd:YAG pulsed laser(wavelength of 1064 nm,pulse width of 15 ns,repetition rate of 1 Hz)in atmosphere environment by using pulsed laser energy density as 16.6 J/cm^2.By being measured plasma emission spectra of hexagonal boron nitride in atmospheric environment,it is proved that under these experimental conditions laser energy is enough to ionization boron nitride target.In the comparative analysis of plasma spectra,the interference of atmospheric plasma emission lines is removed and the emission spectral lines of hexagonal boron nitride are separated;and the characteristic peaks are identified.The experimental results show that the characteristic peaks of:N Ⅱ 393.55 nm and N Ⅱ 423.29 nm are plasma emission spectra of hexagonal boron nitride materials.Under the condition of local thermodynamic equilibrium,two lines of B Ⅰ 208.17 nm and B Ⅰ 250.49 nm are selected.The electron temperature of 19202 K is calculated by Boltzmann two-line method through using the relative strength of two lines.The electron density of plasma calculated by Stark broadening method is 2.4×10^17 cm^-3 by using the full width at half maximum of the measured B Ⅰ 250.49 nm line.

关 键 词：六方氮化硼 等离子体光谱 电子温度 电子密度 

分 类 号：O433.4[机械工程—光学工程]