飞秒激光直写技术制备功能化微流控芯片研究进展  

Research Progress on Fabrication of Functional Microfluidic Chips Using Femtosecond Laser Direct Writing Technology

作　　者：史杨 许兵 吴东 肖轶[3] 胡衍雷 姚成立 Shi Yang;Xu Bing;Wu Dong;Xiao Yi;Hu Yanlei;Yao Chengli(School of Engineering Science,University of Science and Technology of China,Hefei,Anhui 230026,China;School of Chemistry and Chemical Engineering,Hefei Normal University,Hefei,Anhui 230601,China;School of Mechanical Engineering,Nantong Vocational University,Nantong,Jiangsu 226007,China)

机构地区：[1]中国科学技术大学工程科学学院,安徽合肥230026 [2]合肥师范学院化学与化学工程学院,安徽合肥230601 [3]南通职业大学机械工程学院,江苏南通226007

出　　处：《中国激光》2019年第10期1-20,共20页Chinese Journal of Lasers

基　　金：国家自然科学基金(61475149,51675503);安徽省高校优秀青年骨干人才国内外访学研修项目(gxgnfx2018024);中央高校基本科研业务费专项资金(WK6030000004);江苏省高校教师专业带头人高端研修项目(2018GRFX043)

摘　　要：飞秒激光具有独特的超短脉宽和极高的峰值强度,飞秒激光直写技术已广泛用于功能化微流控芯片的制备。从3个方面针对基于飞秒激光直写技术的微流控芯片进行综述:不同材料微流控芯片中的飞秒激光功能器件集成技术、飞秒激光集成微流控芯片的多功能应用以及微流控芯片的高效率飞秒激光加工技术。通过对飞秒激光直写技术在微流控领域的研究结果进行总结与归纳,为飞秒激光直写技术制备微流控芯片的研究、应用及发展方向提供参考。Femtosecond laser direct writing technology has been extensively used for the preparation of functional microfluidic chips because of ultrashort pulse duration and extremely high peak intensity of femtosecond lasers.This study summarizes the following three research directions based on the direct writing technology of femtosecond lasers for microfluidic chips:the integration technology of functional devices fabricated by femtosecond lasers in microfluidic chips with different materials,the multi-functional applications of microfluidic chips integrated by femtosecond lasers,and the rapid processing of microfluidic chips using femtosecond lasers.Furthermore,according to the summaries on the research results of femtosecond laser direct writing technology in the field of microfluidics,this study provides a reference for the research,application,and future development of the microfluidic chips prepared using femtosecond laser direct writing technology.

关 键 词：激光技术 飞秒激光 微流控芯片 微管道 多功能应用 快速加工 

分 类 号：TN249[电子电信—物理电子学]