高功率激光大宽度矩形光束抛物带式积分镜研究  

Research on Parabolic Band Integrating Mirror for High-Power Large-Width Rectangular Laser Beams

作　　者：刘晓东 秦应雄 柳洁 唐霞辉 罗博伟 Liu Xiaodong;Qin Yingxiong;Liu Jie;Tang Xiahui;Luo Bowei(National Engineering Research Center for Laser Processing,School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan,Hubei 430074,China;Wuhan WISCO Huagong Laser Large Equipment Co.,Ltd.,Wuhan,Hubei 430223,China)

机构地区：[1]华中科技大学光学与电子信息学院激光加工国家工程研究中心,湖北武汉430074 [2]武汉武钢华工激光大型装备有限公司,湖北武汉430223

出　　处：《激光与光电子学进展》2019年第19期142-149,共8页Laser & Optoelectronics Progress

基　　金：国家重点研发计划课题(2016YFB1100302);国家自然科学基金(61575072);中央高校基本科研业务费资助(2016YXMS209)

摘　　要：提出一种通用的抛物带式矩形光斑积分镜,建立了分段抛物线匀化模型,推导了满足超精密车削加工的分段抛物线方程。该积分镜解决了传统直线带式积分镜在积分方向上匀化宽度太小的问题,可获得远大于输入光斑直径的匀化宽度,同时分析了该积分镜分割段数对输出光斑均匀性的影响。利用高斯光束行波传输方程,计算回转方向上的离焦光斑尺寸,解决了采用几何光学方法获得离焦光斑尺寸误差大的问题。设计了输出光斑尺寸分别为100mm×3.2mm和14mm×3.3mm的积分镜,采用Zemax和SolidWorks软件进行仿真,仿真得到的光斑尺寸分别为100.2mm×3.2mm和14.2mm×3.3mm。加工了14mm×3.3mm的积分镜,在3kW光纤激光器上进行实验,测得的光斑尺寸为14.3mm×3.3mm,匀化方向均匀性为90%,满足激光加工应用要求。Herein,a versatile parabolic band integrating mirror for a rectangular spot is proposed.A segmented parabolic equation satisfying the ultraprecision turning process is derived using an established segmented parabola homogenization model.Using the integrating mirror,homogenization width in the integrating direction larger than that of the traditional rotating segmental linear integrating mirror can be obtained,which is considerably larger than the input spot diameter.The influence of the number of integrating mirror segments on the uniformity of the output spot is analyzed.To avoid large deviation errors caused by ageometric method,the transmission equation for traveling Gaussian waves is used to calculate the defocused spot size in the rotation direction.Two integrating mirrors with output spots of 100mm×3.2mm and 14mm×3.3mm are designed and simulated by SolidWorks and Zemax,respectively,and the simulated spot sizes are 100.2mm×3.2mm and 14.2mm×3.3mm.The 14mm×3.3mm integrating mirror is processed and tested with a 3-kW fiber laser.The spot size is measured to be 14.3mm×3.3mm,and the uniformity of the homogenization direction reaches up to 90%,which satisfies the application requirements for laser processing.

关 键 词：激光光学 激光光束整形 积分镜 分段抛物线 矩形光斑 匀化光斑 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]