坐标测量机测头系统的校准研究  

Research on the Calibrating of CMM Probe System

作　　者：陈伟琪 陈艳华 张勇 Chen Weiqi;Chen Yanhua;Zhang Yong(Guangdong Provincial Key Laboratory of Modern Geometric and Mechanical Metrology Technology;Tsinghua University)

机构地区：[1]广东省现代几何与力学计量技术重点实验室 [2]清华大学

出　　处：《自动化与信息工程》2019年第5期17-20,48,49,共6页Automation & Information Engineering

基　　金：NQI专项高端装备制造质量大尺度计量测试方法与技术研究（2017YFF0204800）

摘　　要：介绍坐标测量机测头性能参数的校准和补偿方法;设计一套基于三维微宏移动平台和测力传感器的校准系统;采用该系统对坐标测量机模拟式测头的触发变形进行实验研究,获得测头的探测力和实际变形量;补偿后的测头系统在XY平面内探测标准测量球的误差不超过0.3μm,满足坐标测量机模拟式测头的校准需求。A calibration system based on a three-dimensional micro-macro mobile platform and force sensor to calibrate an analogue touch probe is proposed in this paper.The detection force and actual deformation of the probe are obtained.The compensated probe system is verified by the standard measuring ball,and the detection error of the compensated probe does not exceed 0.3μm.The device meets the calibration requirements of three-dimensional analog probe.

关 键 词：接触测头 标定 预行程 

分 类 号：TH7[机械工程—仪器科学与技术]