基于银膜-石墨烯复合膜对称结构的SPR传感器研究  

Research on SPR Sensor Based on Symmetrical Structure of Silver Film-Graphene Composite Film

作　　者：盛祥 刘瑾[1] 杨海马[2] SHENG Xiang;LIU Jin;YANG Haima(School of Electronic and Electrical Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海工程技术大学电子与电气工程学院,上海201620 [2]上海理工大学光电与计算机工程学院,上海200093

出　　处：《传感技术学报》2019年第11期1618-1623,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61701296,U1831133);上海市自然科学基金项目(17ZR1443500);宝山区科技创新专项基金项目(17-C-21);上海航天科技创新基金项目(SAST2017-062);上海市应用型上海工程技术大学电气工程及其自动化专业建设项目

摘　　要：针对棱镜激励银膜SPR传感器灵敏度虽然较金膜结构高,但易被氧化、稳定性较差的缺点,提出一种棱镜耦合激励银膜-石墨烯-介质-石墨烯-银膜复合膜对称结构的SPR传感器,增加石墨烯膜层,解决银膜SPR传感器易氧化导致稳定性下降问题。采用角度调制的方法对SPR传感结构进行了性能参数分析,研究了金属材质、石墨烯以及检测介质的厚度对传感性能的影响。结果表明,银膜相比金膜,具有更好的共振效果,灵敏度较高;通过调节检测介质的厚度,可以改变角度的调节范围,实现了传感器的可调性;对称传感结构可以产生双共振峰SPR曲线,为分布式传感提供了可供参考的依据;石墨烯优化并提高了传感器的稳定性和检测灵敏度。A prism-coupled excitation silver film-graphene-medium-graphene-silver film composite film symmetry structure is proposed,which is sensitive to the high sensitivity of the prismatic excitation silver film SPR sensor,but it is easy to be oxidized and has poor stability.The SPR sensor increases the graphene film layer and solves the problem of stability degradation caused by the easy oxidation of the silver film SPR sensor.The performance parameters of the SPR sensing structure were analyzed by angle modulation method.The effects of metal material,graphene and the thickness of the detection medium on the sensing performance were studied.The results show that the silver film has better resonance effect and higher sensitivity than the gold film.By adjusting the thickness of the detection medium,the adjustment range of the angle can be changed to realize the adjustability of the sensor;the symmetric sensing structure can generate double The formant SPR curve provides a basis for distributed sensing;graphene optimizes and improves sensor stability and detection sensitivity.

关 键 词：SPR传感器 对称传感结构 石墨烯 角度调制 灵敏度 

分 类 号：TH744[机械工程—光学工程] O439[机械工程—仪器科学与技术]