基于可拉伸材料的动态调谐彩色滤波器  

Dynamic tuning color filters based on stretchable materials

作　　者：冯延 田楠 王继成[1] 桑田[1] FENG Yan;TIAN Nan;WANG Jicheng;SANG Tian(Department of Optoelectronic Science and Engineering,School of Science,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学理学院光电科学与工程系

出　　处：《应用光学》2019年第6期1174-1180,共7页Journal of Applied Optics

基　　金：国家自然科学基金(11504139,11811530052);中国博士后基金(2018T110440,2017M611693)

摘　　要：可动态调谐的集成光学器件在成像、显示等领域拥有良好的应用前景。提出一种新颖的基于可拉伸衬底的动态调谐氧化钛-聚合物微纳结构滤波器,该结构表面可利用电子束蒸发沉积与剥离技术制作,使用时域有限差分法(FDTD)模拟优化结构参数,分析了滤波效果及其物理规律。分析结果表明:通过拉伸衬底,所设计的滤波器结构能够在可见光波段上实现全波段滤波,并且具有超高反射率,反射率大部分处于95%以上,最高可达99.1%。这为利用沉积剥离技术制备动态调谐滤波器阵列的实验提供了理论支持。相较于静态调谐的滤波器一旦定型即结构无法更改的缺点,提出的动态调谐结构在器件定型后依然可以进行实时调控。The dynamic tuning integrated optical devices possess a good application prospect in the fields of imaging and display. A noval dynamic tuning titanium oxide polymer micro-nano structure filter based on stretchable substrate was proposed. The surface of the structure could be fabricated by the electron beam evaporation deposition and lift-off technology.The finite-difference time-domain(FDTD) method was used to simulate and optimize the structure parameters,and the filtering effect and its physical laws were analyzed. The analysis results indicate that, by stretching the substrate, the designed filter structure can achieve full waveband filtering at the visible light waveband, and it also has ultra-high reflectivity, most of which is above 95%, and the maximum reaches 99.1%. This provides theoretical support for the experiment of fabricating dynamic tuning filter array by deposition and lift-off technology. Compared with the disadvantage that the device structure of static tuning filter cannot be changed once it is finalized, the dynamic tuning structure can still be adjusted in real time after the device is finalized.

关 键 词：超表面 动态调谐 机械拉伸 滤波器 

分 类 号：TN613[电子电信—电路与系统]