融石英光学材料离子束抛光去除特性研究  

Study on removal characteristics of fused quartz optical materials by ion beam figuring

作　　者：李晓静[1,3] 王大森 张旭[1] 张宁 郭海林[1] 裴宁[1] LI Xiaojing;WANG Dasen;ZHANG Xu;ZHANG Ning;GUO Hailin;PEI Ning(Ningbo Branch of Chinese Academy of Ordnance Science,Ningbo 315103,China;Department of Electronic Information Engineering,Changchun University of Science and Technology,Changchun 130022,China;Center for Innovative Ultra precision Optical Manufacturing of National Defense,Chengdu 610041,China)

机构地区：[1]中国兵器科学研究院宁波分院,浙江宁波315103 [2]长春理工大学电子信息工程学院,吉林长春130022 [3]国防科技工业光学超精密加工技术创新中心,四川成都610041

出　　处：《兵器材料科学与工程》2019年第6期9-12,共4页Ordnance Material Science and Engineering

基　　金：国家科技重大专项（2017ZX04022001-205-001）;宁波市自然科学基金项目（201601HJ-B01286）

摘　　要：为研究融石英光学材料表面离子束抛光的去除特性,在分析法拉第扫描的离子束电流密度分布参数与去除函数间关系的基础上,建立基于法拉第扫描的离子束抛光去除函数模型。采用等间距采集数据进行法拉第扫描试验,对采样数据进行高斯拟合,得到离子束电流密度分布。对法拉第扫描方法和线扫描方法对比分析研究。结果表明:基于法拉第扫描对融石英材料进行离子束抛光方法,可缩短离线计算去除函数时间,提高抛光效率;去除函数峰值的去除率Rmax和法拉第扫描的电流密度峰值Jmax间的关系Rmax=1.5962Jmax。In this paper,the removal characteristics of the fused silica optical material surface during the ion beam figuring process were studied.After analysis of the relationship between the ion beam current density distribution parameters and the removal function of the Faraday scanning,the ion beam polishing removal function model based on Faraday scanning was established.The Faraday scanning experiment was carried out by using the method of collecting data at equal intervals,and Gaussian fitting was performed on the collected data to obtain the ion beam current density distribution.The fitting result shows that the relationship between the removal function peak removal rate Rmaxand the Faraday scan current density peak Jmaxis Rmax=1.5962 Jmax.Comparative analysis was carried out between Faraday scanning method and linear scanning method.The results show that,the fused silica material was polished by ion beam figuring has higher polishing efficiency when the removal function is determined by Faraday scanning method.

关 键 词：离子束抛光 去除函数 法拉第扫描 峰值去除率 

分 类 号：TB321[一般工业技术—材料科学与工程]