工业摄影测量技术对抛光盘平面度的检测  

Industrial photogrammetry for the detection of polishing plate flatness

作　　者：黄桂平[1] 朱文芳 王伟峰 谢磊[4] HUANG Guiping;ZHU Wenfang;WANG Weifeng;XIE Lei(North ChinaUniversityof Water Resources and Electric Power,Zhengzhou 450046,China;Zhengzhou Chenway Technology Co.,Ltd,Zhengzhou 450001,China;Yellow River Conservancy Technical Institute,kaifeng 475004,China;Chengdu Precision Optical Engineering Research Center,Chengdu 610041,China)

机构地区：[1]华北水利水电大学,河南郑州450046 [2]郑州辰维科技股份有限公司,河南郑州450001 [3]黄河水利职业技术学院,河南开封475004 [4]成都精密光学工程研究中心,四川成都610041

出　　处：《测绘科学与工程》2019年第3期47-50,共4页Geomatics Science and Engineering

摘　　要：针对光学器件加工中环形抛光机抛光盘形面趋势难以快速量化表征的难题,提出采用非接触、超便携的工业摄影测量技术对抛光盘平面度进行检测的方法。通过使用工业摄影测量系统对粘贴有测量靶标的抛光盘进行定期的旋转测量,可以有效地对抛光盘表面进行检测,经三次精抛试验就可以将抛光盘平面拟合误差从0.10mm降至0.04mm,并快速获取抛光盘平面度各类偏差数据。在抛光盘侧壁上布设基准点作为各次测量结果间的转换基准,还可以有效地判断抛光盘形面各区域的变化状况,这对于指导环抛机加工光学元器件具有重要意义。In order to deal with the difficulty in rapidly quantifying and characterizing the polishing plate surface of the ring polisher in optical processing,a non-contact,ultra-portable industrial photogrammetry technology is proposed to detect the flatness of the polishing plate in this paper.By using an industrial photogrammetric system to periodically rotate and measure the polishing plate,the surface of the polishing plate can be efectively detected.After three fine polishing experiments,the plane fit-ting error of polishing plate can be reduced from 0.10mm to 0.04mm,and quickly obtain various deviation data of polishing plate flatness.The reference points on the side wall of the polishing plate are set as the conversion reference of each measurement result to effectively judge the change of each area of the polished plate surface,which is important for guiding the ring throwing machine to process machine optical components.

关 键 词：环抛机 抛光盘 工业摄影测量 平面度测量 

分 类 号：P231[天文地球—摄影测量与遥感]