含氢和无氢类金刚石涂层的制备及切削性能研究  

Preparation and Cutting Performance of Hydrogen-containing and Hydrogen-free Diamond-like Coating

作　　者：张而耕 牛帅 陈强 黄彪 ZHANG Ergeng;NIUShuai;CHENQiang;HUANG Biao(Shanghai Engineering Research Center of Physical Vapor Deposition(PVD)Superhard Coating and Equipment,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学上海物理气相沉积(PVD)超硬涂层及装备工程技术研究中心

出　　处：《陶瓷学报》2019年第5期637-643,共7页Journal of Ceramics

基　　金：上海市科委重点支撑计划(170905038000)

摘　　要：为研究磁过滤阴极电弧沉积无氢类金刚石(Ta-C)涂层及气相沉积含氢类金刚石(含氢DLC)涂层的成分、结构及力学特性,以及两种涂层对刀具高速切削铝合金性能的影响。采用髙分辨率的显微镜观察膜层的表面形貌;Raman光谱分析sp2/sp3键角混乱度和sp2团簇信息,以及sp3-C/sp2-C的比例关系;纳米压痕仪测量膜层的硬度;高速铳削实验表征涂层刀具的切削性能并分析刀具的失效原因及工件的加工质量。结果表明,Ta-C涂层表面致密光滑,表面颗粒细小,无明显凹坑,Ta-C和含氢DLC涂层在Raman光谱中D峰和G峰强度比值Id/Ig分别为0.5和1.1。Ta-C及含氢DLC涂层厚度分别为0.7μm和1μm,摩擦系数分别是0.11和0.18,结合力分别满足工业等级HF1和HF2。在高速、干式切削铝合金条件下,Ta-C涂层铳刀的切削寿命是含氢DLC涂层铳刀的1.5倍,涂层铳刀加工工件的表面粗糙度整体为上升趋势,但Ta-C涂层刀具加工工件的表面粗糙度值较低。相较于含氢DLC涂层,磁过滤阴极电弧沉积Ta-C涂层刀具抑制铝合金材料粘附效果更佳,切削寿命更长,加工出的工件表面质量更好,因此更适用于铝合金的加工。To study the composition,structure and mechanical properties of magnetically filtered cathodic arc deposited hydrogen-free diamond-like carbon(Ta-C)and vapor deposited hydrogen-containing diamond-like carbon(Hydrogen DLC),and the influence of the two coatings on the tool's high-speed cutting of aluminum alloy,a high-resolution microscope was used to observe the surface morphology of the films;Raman spectroscopy was used to analyze the angle chaos of the sp2/sp3 bond,sp2 cluster information,and the ratio relationship of sp3-C/sp2-C;the nanoindentation instrument was used to measure the film's hardness;high-speed milling experiments characterize the cutting performance of the coated tool and analyze the failure of the tool and the quality of the workpiece.The test results show the surface of Ta-C coating is dense and smooth,the surface particles are small,and there is no obvious pit.The Id/Ig D-to-G-peak intensity ratios of Ta-C and hydrogen-containing DLC coating in the Raman spectrum are 0.5 and 1.1.The thicknesses of Ta-C and hydrogen-containing DLC coatings are 0.7μm and 1μm,respectively,and the friction coefficients are 0.11 and 0.18,respectively,and the bonding strengths meet the industrial grades HF1 and HF2,respectively.For high-speed dry-cutting of aluminum alloys,Ta-C-coated cutters have a 1.5-fbld longer cutting life than hydrogen-containing DLC-coated cutters,and the overall surface roughness of coated workpieces for milling cutters is on the rise,but Ta-C Coated tools have lower surface roughness values for machined workpieces.Compared with the hydrogen containing DLC coating,the magnetic filter cathode arc deposited Ta-C coated tool can inhibit the adhesion of the aluminum alloy material better,its cutting life is longer,and the surface quality of the workpiece is better.Therefore,it is more suitable for machining aluminum alloys.

关 键 词：无氢类金刚石涂层 含氢类金刚石涂层 铝合金 切削寿命 表面粗糙度 

分 类 号：TQ174.75[化学工程—陶瓷工业]