Ge基底LaF3-ZnS-Ge高耐用中波红外增透膜  

LaF3-ZnS-Ge high-durability MWIR antireflective film on Ge substrate

作　　者：程海娟 于晓辉 彭浪 普群雁 蔡毅[1] 李茂忠[2] 杨伟声[2] 白玉琢 赵劲松 王岭雪[1] Cheng Haijuan;Yu Xiaohui;Peng Lang;Pu Qunyan;Cai Yi;Li Maozhong;Yang Weisheng;Bai Yuzhuo;Zhao Jinsong;Wang Lingxue(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;North Night-Vision Science&Technology Group Co.,Ltd,Kunming 650221,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]北方夜视科技集团有限公司,云南昆明650221

出　　处：《红外与激光工程》2019年第11期251-257,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(61471044)

摘　　要：研究了LaF3材料的蒸发特性及其在2.5~12μm红外波段的光学常数,并将LaF3晶体作为低折射率材料在Ge基底上制备了中波红外3.7~4.8μm波段高耐用性增透膜。SEM照片显示,基于LaF3材料的高耐用性增透膜表面纳米晶粒分布均匀致密,表面光洁度高。利用傅里叶变换红外光谱仪测试了其光谱特性,在3.7~4.8μm波段,峰值透射率达到99.4%,双面镀膜平均透射率由47.7%提高到98.8%。牢固度、耐久性等环境试验结果显示,膜层在保持高的光学性能的同时还可以在较为严苛的恶劣环境中使用。Evaporation characteristics and optical constants of LaF3 materials in 2.5-12μm infrared band were investigated.With low refractive index LaF3 materials,high-durability antireflection(AR)coatings in 3.7-4.8μm medium-wavelength infrared bands were designed and fabricated on Ge substrate.SEM image of the AR coatings with the LaF3 shows that the surface nanocrystals is uniform and densified.The measured optical properties by Fourier tranform infrared spectrometer indicate that the peak transmittance is as high as 99.4%,and the average transmittance increases to 98.8%from 47.7%in3.7-4.8μm after double-sided coating.The firmness and durability environmental tests signify that this AR coating can work in harsh environment while maintaining good optical properties.

关 键 词：LAF3 高耐用性 增透膜 中波红外 

分 类 号：O439[机械工程—光学工程]