折反射检验大口径凸双曲面的研究  

Catadioptric Testing of Large Aperture Convex Hyperboloid Surfaces

作　　者：赵鹏玮 张金平[1] 叶璐[1] 郑列华[1] Zhao Pengwei;Zhang Jinping;Ye Lu;Zheng Liehua(Departmeyit of Public Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所公共技术室,上海200080 [2]中国科学院大学,北京100049

出　　处：《光学学报》2019年第11期276-281,共6页Acta Optica Sinica

摘　　要：为解决凸双曲面检验中因辅助反射镜的口径过大而导致其加工困难的问题,提出一种可用于检验凸双曲面反射镜的方法。在Hindle法的基础上,利用校正透镜和球面反射镜组成消像差系统,通过设计检验光路缩短了辅助反射镜与待检双曲面镜的距离。该方法不但可以减小辅助反射镜的口径,而且能够维持待检双曲面镜的有效口径不变。根据三级像差理论推导公式,设计口径为800 mm,顶点曲率半径为1800 mm,二次曲线常数为-2.25的大口径凸双曲面的检验光路。对所设计的检验光路进行分析,结果显示:其残余像差峰谷值为0.0003λ(λ=632.8 nm),均方根误差为0.0001λ。这表明该方法可以用于检验大口径、大相对口径凸双曲面,并且具有辅助面口径小、检验系统的长度较短的优点。In the testing of convex hyperboloid surfaces, the required auxiliary mirror is too large to manufacture. A new method of testing is proposed herein to solve this problem. Based on the Hindle test, the correcting lens and the spherical mirror produce a ray that has no aberration and is incident to the test surface. The distance between auxiliary mirror and hyperboloid mirror is short. This reduces the aperture of the auxiliary mirror, while the effective aperture does not reduce. The formula is derived based on the third-order aberration theory. A test optical system is designed, wherein the aperture of the mirror being tested is 800 mm, the vertex radius is 1800 mm, and the conic constant is-2.25. The peak-valley value of the residual aberration is 0.0003λ(λ=632.8 nm), and the root mean square is 0.0001λ. The analysis shows that this method can be used to test large aperture and large relative aperture convex hyperboloid surfaces with a small auxiliary mirror and short length.

关 键 词：光学设计 凸非球面检验 三级像差理论 非球面 大口径 大相对口径 

分 类 号：O435.2[机械工程—光学工程]