离面型双层亚波长光栅微位移传感系统研究  

Research on the micro displacement sensing system of off surface double-layer sub-wavelength grating

作　　者：赵玉娇 周震[1] ZHAO Yujiao;ZHOU Zhen(School of Instrumentation and Optoelectronic Engineering,Beihang University,Beijing 100089,China)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院

出　　处：《光通信技术》2019年第12期39-44,共6页Optical Communication Technology

基　　金：国家某重大项目2项

摘　　要：随着微电子机械系统(MEMS)惯性传感器件对微位移检测精度的要求越来越高,微位移检测技术已经成为惯性传感领域的研究热点,亚波长光栅的出现为微位移测量提供了一个全新的发展前景。以离面型双层亚波长光栅位移传感系统为研究对象,分别研究了亚波长光栅等周期与不等周期时系统的位移传感特性,利用Rsoft软件对2种结构中双光栅相对运动时系统透射率与光栅位移量之间的关系以及系统关键结构参数对位移检测灵敏度的影响规律进行模拟仿真,并对2种双光栅位移传感系统进行了结构优化设计与性能仿真,理论验证了离面型双层亚波长光栅位移传感系统结构的灵活性及方案的可行性。With the higher and higher requirements of micro-electro-mechanical-systems(MEMS)inertial sensors for micro-displacement detection precision,micro-displacement detection technology has become a research hotspot in the field of MEMS inertial sensing.The emergence of sub-wavelength gratings provides a new development prospect for micro-displacement measurement.In this paper,the off surface double-layer sub-wavelength grating displacement sensing system is studied.The displacement sensing characteristics of the system of equal period and unequal period are studied.The relationship between the transmittance of diffracted light and the off surface double-layer displacement of the dual sub-wavelength gratings and the influences of the key structural parameters of the system on the sensitivity of the displacement detection are simulated by Rsoft software.The structure optimization and performances of the two dual grating micro-displacement sensing systems are simulated and compared.The high sensitivity advantage of sub-wavelength grating displacement detection is verified in theory.

关 键 词：亚波长光栅 倏逝波 微位移检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]