基于微带谐振器的微波微等离子体线性阵列的激励特性研究  

Study on Excitation of Microwave Microplasma Linear Array Based on Microstrip Resonator

作　　者：张秀秀 廖斌[1] ZHANG Xiu-xiu;LIAO Bin(Department of Electrical Engineering,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学信息学院电子系

出　　处：《真空电子技术》2019年第6期98-101,共4页Vacuum Electronics

摘　　要：本文基于微带线谐振器理论和耦合模理论,采用13单元微波微等离子体线性阵列源,研究了不同真空度、输入功率等对微波微等离子体线性阵列激励特性的影响。实验结果表明,微波微等离子体线性阵列的放电区域随着输入功率和真空度的减小而减小。这为小功率微波微等离子体线性阵列源的进一步研究提供基础。Based on the theories of microstrip line resonator and coupled-mode,the influence of vacuum degree and input power on the excitation of microwave microplasma linear array with a 13-unit microstrip resonator is studied.The experimental result shows that the ignited array area decreases with vacuum degree and input power.The work provides a basis for further research on low-power microwave microplasma linear array.

关 键 词：微波微等离子体线性阵列 微带谐振器 真空度 输入功率 

分 类 号：O53[理学—等离子体物理]