基于辅助电极的静电喷雾优化  

Optimization of electrospray process based on auxiliary electrode

作　　者：王欢 张瑶 Wang Huan;Zhang Yao(School of Electrical Engineering,Shaanxi Polytechnic Institute,Xianyang 712000,China)

机构地区：[1]陕西工业职业技术学院电气工程学院

出　　处：《国外电子测量技术》2019年第11期97-101,共5页Foreign Electronic Measurement Technology

基　　金：咸阳市工业攻关项目（2018K02-10）;陕西工业职业技术学院院级科研项目（2K18-08）资助

摘　　要：针对在静电喷雾过程中其沉积面积难以控制这一问题,提出在经典静电喷雾模型上布置套筒型辅助电极从而改变喷头下方空间电场,达到控制喷雾射流并减小沉积面积的目的。通过使用COMSOL仿真软件对静电喷雾空间电场进行仿真得到的电场强度分布图、矢量图等对电场进行分布进行表示。对辅助电极不同参数条件下的静电喷雾模型进行电场仿真分析,从而对静电喷雾射流行为以及沉积面积进行预测,对辅助电极静电喷雾模型进行对比优化最终得到一组优化的辅助电极参数。在该组优化参数条件下进行静电喷雾沉积实验,验证了仿真结论的正确性。表明套筒型辅助电极可以控制射流稳定性并显著减小沉积面积,使用优化后参数进行静电喷雾沉积可将玻璃浆料薄膜的线宽从1000/μm以上减小至400μm以下。Aiming at the problem that the deposition area is difficult to control during the electrostatic spraying process,in this paper,a sleeve-type auxiliary electrode on the classical electrostatic spray model isput forward to change the electric field to achieve the purpose of controlling the spray jet and reducing the deposition area.The electric field distributions during electrospray process is represented by electric intensity distributions and vector diagram which obtained by COMSOL simulation software.The behavior of electric jet and the deposition area were predicted by simulating and analyzing the electrospray electric field when using auxiliary electrode under the different parameters,then a series of excellent parameters of auxiliary electrode can be obtained by optimizing the electrospray model.Finally,the simulation results are verified by carrying out the experiment under the optimized parameters.It is shown that the sleeve-type auxiliary electrode can increase the stability of the electric jet and reduce the deposition area significantly.The glass frit film with its width less than 400 μm can be obtained by using the optimized parameters for electrospray deposition while it’s more than 1000 μm without the sleeve-type auxiliary electrode.

关 键 词：静电喷雾 辅助电极 仿真优化 沉积面积 

分 类 号：TN405[电子电信—微电子学与固体电子学]