基于Qsys的时栅信号处理系统设计与实现  

Design and Implementation of Time-Grating Signal Processing System Based on Qsys

作　　者：陈自然[1] 赵有祥 田伟 赵建 王露露 卜敬 CHEN Ziran;ZHAO Youxiang;TIAN Wei;ZHAO Jian;WANG Lulu;BU Jing(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing Key Laboratory of Time Grating Sensing and Advanced Testing Technology,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室

出　　处：《传感技术学报》2019年第12期1802-1808,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51775075);重庆市基础与前沿研究计划项目(cstc2016jcyjA0505);重庆市教委科学技术研究项目(KJZD-K201901105);重庆理工大学研究生创新基金项目(YCX20192026)

摘　　要：为提高时栅传感器位移测量精度和测量分辨力,研究采用FPGA嵌入式锁相环倍频产生4路同频且相位差为45°的高频时钟脉冲作为测量基准,利用多路并行双边沿计数方法对时栅参考信号和时栅感应信号进行相位测量,通过相位差转换得到具有高分辨力的时栅位移信号。采用Qsys开发平台设计Nios-II软核进行数据处理,利用傅立叶级数谐波修正技术对测量结果进行误差修正,提高时栅传感器的测量精度。在72对极磁场式时栅角位移传感器上进行精度测试,实验结果表明:经过误差修正后,该系统测量的整周误差从-57.2″~92.5″下降到-2.0″~2.5″。作为角位移传感器满足高端装备高精度定位需求,具有重要的工程应用价值。To improve the measurement accuracy and resolution of time-grating displacement sensors,a FPGA chip was employed to produce four channels of high frequency clock pulses with the same frequency and 45°phase difference as measurement standards using frequency multiplication techniques of PLL.The phase differences between the reference signal and the inducted signal yielded from time-grating sensors were measured by multi-channel parallel bilateral edge-triggered method for counting,from which the measured displacement values with high resolution were obtained.The kernel of Nios-II based on Qsys platform was designed for data processing.And the measurement errors were corrected to improve the measurement accuracy using Fourier series harmonic correction techniques.The 72-pairs-polar magnetic-field time-grating angular displacement sensor was applied into the experiment of the accuracy measurement,and the measurement report showed that the measurement errors were decreased from-57.2″~92.5″to-2.0″~2.5″within 0°~360°.As a result,the measurement accuracy of the angular displacement sensor met the positioning requirements of the advanced manufacturing equipment.Therefore,the proposed signal processing system and the error correction method are promising for its engineering applications.

关 键 词：时栅传感器 信号处理 多路计数 误差修正 

分 类 号：TH712[机械工程—测试计量技术及仪器]