具有ITO电极的QCM设计与性能研究  

Design and Performance Study on QCM With ITO Electrode

作　　者：朱琎 尹艳平 马澄 马国军[1] ZHU Jin;YIN Yanping;MA Cheng;MA Guojun(Key Laboratory of Intelligent Ocean Information Perception and Transmission Technology,School of Electronic and Information,Jiangsu University of Science and Technology,Zhenjiang 212003,China)

机构地区：[1]江苏科技大学电子信息学院智慧海洋信息感知与传输技术重点实验室

出　　处：《压电与声光》2019年第6期861-865,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61804068);江苏省研究生创新工程基金资助项目(KYCX19_1686)

摘　　要：为了提高石英晶体微天平(QCM)的检测灵敏度,提出了一种具有氧化铟锡(ITO)电极结构的QCM。利用有限元分析软件在QCM芯片电极区采用密度等效法实现计算量的简化,在通过电极尺寸优化得到具有理想能陷效应的QCM的基础上,采用控制磁控溅射的气体压强、工作电压、电流等方法,得到具有导电性好,平滑度高,透光性优良的ITO电极。经振荡频率测试及质量灵敏度分析计算表明,ITO电极的QCM频率稳定性良好(频率变化仅3 Hz),质量灵敏度是金电极QCM的1.5倍。In order to improve the detection sensitivity of quartz crystal microbalance(QCM),a QCM with indium tin oxide(ITO)electrode structure is proposed in this paper.The finite element analysis software is used to reduce the calculation amount in the electrode region of QCM chip by density equivalent method.On the basis of QCM with ideal trapping effect obtained by optimizing electrode size,ITO electrodes with good conductivity,smoothness and transparency were obtained by controlling gas pressure and working voltage and current of magnetron sputtering.The results of oscillation frequency test and mass sensitivity analysis show that the frequency stability of QCM with ITO electrode is good(frequency variation is only 3 Hz),and the mass sensitivity is 1.5 times of that of gold electrode QCM.

关 键 词：氧化铟锡 石英晶体微天平(QCM) 质量灵敏度 有限元分析 能陷效应 

分 类 号：TN384[电子电信—物理电子学]