飞秒激光诱导ZnO晶体表面短周期纳米结构  

Periodic nanostructures on ZnO surface induced by the femtosecond laser

作　　者：贾鑫 JIA Xin(School of Arts and Sciences,Shanghai Dianji University,Shanghai 201306,China)

机构地区：[1]上海电机学院文理学院,上海201306

出　　处：《上海电机学院学报》2019年第6期311-314,共4页Journal of Shanghai Dianji University

基　　金：上海电机学院基础研究专项计划资助项目(A1-0288-19-031-04);上海电机学院学科建设资助项目(16JCXK02)

摘　　要：飞秒激光照射半导体、金属等材料,能够诱导材料表面纳米周期结构,有效地改善材料电学、光学、力学等特性。这一方法突破了激光加工的衍射极限,是激光制备纳米结构的有效手段。利用飞秒激光照射ZnO晶体,在表面诱导短周期纳米条纹结构。利用光参量放大系统改变飞秒激光波长,能够制备不同周期的纳米条纹。由于空气环境对条纹形成的影响,材料表层形成不规则的纳米条纹;将表层不规则纳米条纹烧蚀掉后,材料内层出现规则的纳米条纹。条纹周期与激光波长呈线性关系,这可能与材料表面二次谐波的形成有关。Surface periodic nanostructures, which improve the electrical, optical and mecha-nical properties of materials, can be induced by the irradiation of femtosecond laser on semi-conductors and metals. This method surpasses the diffraction limit of laser processing, which becomes a valid tool to fabricate the nanostructures by laser. The short-periodic nanoripples on the ZnO crystal surface were induced after the irradiation of femtosecond laser pulses. The nanoripples with different periods were fabricated by changing the laser wavelengths via the optical parametric amplification system. The irregular nanoripples were formed on the sample surface due to the air environment, while the regular ones appeared in the subsurface as the surface irregular nanoripples were ablated off. A linear relationship between the nanoripple periods and the laser wavelengths may be related to the second harmonic generation on the material surface.

关 键 词：飞秒激光 短周期纳米结构 ZNO晶体 

分 类 号：O436.3[机械工程—光学工程]