竖直液膜方法制备大长径比微细工具电极  

Fabrication of High Aspect Ratio Tool Electrodes Using Vertical Liquid Membrane Method

作　　者：桑雨萌 曾永彬[1] SANG Yumeng;ZENG Yongbin(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院

出　　处：《电加工与模具》2019年第6期29-30,31-32,46,共5页Electromachining & Mould

基　　金：国家自然科学基金资助项目(51775276)

摘　　要：利用COMSOL拟合进行电场仿真分析确定电流密度分布,通过实验研究了偏置量、电解液浓度和往复运动参数对所制备电极形貌的影响,从而制备微细工具电极。研究发现:在无偏置、0.2 mol/L的KOH条件下,采用竖直液膜电化学刻蚀方法可制备尺寸均匀的大长径比微细工具电极,并且往复运动有助于提高所制备电极的均匀性。The electric field simulation analysis was carried out by COMSOL fitting to determine the current density distribution,and the bias,electrolyte concentration and reciprocating motion parameters on the morphology of the prepared electrode were studied in order to prepare the micro tool electrode.It was found that tool electrodes with large aspect ratio and uniform size can be prepared under 0 bias and 0.2 mol/L KOH conditions by a vertical liquid membrane electrochemical etching method,and the reciprocating motion can help to improve the uniformity of the prepared electrode.

关 键 词：微细电极 竖直液膜 电化学刻蚀 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]