2.06μm激光偏振膜设计与工艺方法  

Design and Processing Method of 2.06 μm Laser Polarizing Film

作　　者：张永久 刘连泽[1] 张阔[1] 岳威[1] 崔铖 ZHANG Yong-jiu;LIU Lian-ze;ZHANG Kuo;YUE We;CUI Cheng(North China Research Institute of Electro-Optics,Beijing 100015,China)

机构地区：[1]华北光电技术研究所

出　　处：《红外》2019年第10期14-19,共6页Infrared

摘　　要：介绍了近红外固体激光器中2.06μm激光偏振膜的用途、设计与制备方法。基于薄膜光学的基本理论以及三种不同膜系结构的对比,确定了初始膜系结构。讨论了薄膜选材、通带波纹压缩、工艺制备等相关技术问题。利用计算机优化软件对膜系结构进行了反复优化。采用电子束真空蒸镀和离子源辅助沉积工艺完成了偏振膜的制备,并对其进行了光谱检测。然后根据测试结果对制备过程中的相关参数进行了优化,最终制备出了光学性能优异、膜层吸收少、均匀性好、稳定性高的激光偏振膜。The application, design and preparation of a 2.06 μm laser polarizing film in the near-infrared solid-state laser are introduced. Based on the basic theory of thin-film optics and the comparison of three different membrane structures, the initial membrane structure is determined. Relevant technical issues such as film selection, pass-band ripple compression, and process preparation are discussed. The membrane structure is repeatedly optimized by computer optimization software. The polarizing film is prepared by electron beam vacuum evaporation and ion source assisted deposition, and its spectral detection is performed. Then, the relevant parameters in the preparation process are optimized according to the test results. Finally, the laser polarizing films with excellent optical properties, low film absorption, good uniformity and high stability are prepared.

关 键 词：偏振膜 膜系设计 离子源辅助沉积 光谱检测 

分 类 号：O484[理学—固体物理]