基于皮秒激光烧蚀的氧化铟锡纳米颗粒制备系统  

Picosecond fiber laser-resolved nano-processing system for indium tin oxide nanoparticles synthesis

作　　者：王莉荣 周锋全 贺常瑞 袁帅[1] WANG Lirong;ZHOU Fengquan;HE Changrui;YUAN Shuai(School of Optical-Electrical and Computer Engineering University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院

出　　处：《光学仪器》2019年第6期65-70,共6页Optical Instruments

基　　金：国家自然科学基金(61505106);上海市晨光计划(15CG51)

摘　　要：液相脉冲激光烧蚀法合成纳米颗粒是一种绿色环保的制备方法。基于该方法搭建了一套氧化铟锡(ITO)纳米颗粒制备系统,该系统采用皮秒激光作为光源辐照去离子水中的氧化铟锡固体靶材,最终合成出ITO纳米颗粒。随着入射脉冲能量的增加及激光辐照时间的增长,激光烧蚀效率明显增大,ITO产量增多。采用扫描电子显微镜(SEM)及X射线能谱仪(EDS)对制备的ITO纳米颗粒进行表征,所制备的纳米颗粒不含除铟(In)、锡(Sn)之外的杂质成分,纯度较高且72%的ITO纳米颗粒粒径大小在20~50 nm之间。The synthesis of nanoparticles by pulsed laser ablation in liquid is a green and environmental-friendly method. Based on this method, a set of induum tin oxide ITO nanoparticles preparation system was built, which used picosecond laser as a light source to irradiate the solid target of ITO in deionized water, and finally synthesized ITO nanoparticles. With the increase of incident pulse energy and laser irradiation time, the laser ablation efficiency increased obviously and ITO production increased. The ITO nanoparticles were characterized by scanning electron microscopy(SEM) and X-ray energy dispersive spectrometer(EDS). The prepared ITO nanoparticles have high purity and did not contain impurities other than Indium(In) and Tin(Sn).In addition, 72% of the ITO nanoparticles had a particle size of 20-50 nm.

关 键 词：光纤激光器 液相脉冲激光烧蚀 氧化铟锡 纳米颗粒 

分 类 号：O437[机械工程—光学工程]