光学自由曲面加工机床在机测量系统精度建模与定量分析  

Accuracy Modeling and Quantitative Analysis of On-machine Measurement System for Optical Free-form Surface Machining Machine

作　　者：梁坤 丁辉[1] 程凯[1] LIANG Kun;DING Hui;CHENG Kai(Harbin Institute of Technology,Harbin 150001)

机构地区：[1]哈尔滨工业大学精密工程研究所

出　　处：《航空精密制造技术》2019年第6期15-20,共6页Aviation Precision Manufacturing Technology

基　　金：国家自然科学基金资助项目(51675135)

摘　　要：为了提高光学自由曲面加工机床的整体加工能力,进行在机测量系统的特征测量功能开发。在给出在机测量系统结构构成及功能需求下,进行在机测量系统几何精度建模,进行几何静态误差辨识与补偿,进而规划在机测量系统基本功能工作流程。最后,通过进行多项测量实验,可得到标准平面及凹球面测量不确定度达到微米级,检测面型工件特征测量结果较为稳定。In order to improve the overall processing capability of the optical free-form surface machining machine, the feature measurement function of the on-machine measurement system was developed. The structure and function requirements of the on-machine measurement system are given. The geometric accuracy of the on-machine measurement system is modeled, and the geometric static error identification and compensation is carried out to plan the basic functional workflow of the on-machine measurement system. By performing a number of measurement experiments, the measurement uncertainty of the standard plane and the concave spherical surface can be up to the micron level, and the measurement results of the inspection surface type workpiece are relatively stable.

关 键 词：在机测量系统 几何精度建模 误差辨识与补偿 特征测量 

分 类 号：TP301.6[自动化与计算机技术—计算机系统结构]