基于超平表面的原子力显微镜探针磨损研究  

Study on Probe Wear of Atomic Force Microscope Based on Super Flat Surface

作　　者：黄羽茜 宋贵才[1] 孙德昌 Huang Yuxi;Song Guicai;Sun Dechang(Changchun University of Technology,Changchun Jilin,130000)

机构地区：[1]长春理工大学

出　　处：《电子测试》2020年第3期49-50,27,共3页Electronic Test

摘　　要：原子力显微镜的图像质量受到探针磨损情况的直接影响,本文主要对基于超平表面的原子力显微镜(AFM)探针磨损问题进行了试验研究,针对探针磨损效率以材料表面的粗糙度(Rq)作为评估指标,测试样品选用了Rq小于0.5nm的超平表面。探针在10%的反馈回路设定值比例和悬臂目标振幅比例的测试条件下,采用1Hz的扫描速度及1.7的I-gain值可使磨损最小,进而有效提升探针使用寿命。The image quality of AFM is directly affected by the wear of AFM probe.In this paper,the wear of AFM probe based on super flat surface is studied.For the wear efficiency of AFM probe,the roughness of material surface(RQ)is used as the evaluation index,and the super flat surface with RQ less than 0.5 nm is selected as the test sample.Under the test condition of 10%set value proportion of feedback loop and cantilever target amplitude proportion,the use of 1 Hz scanning speed and 1.7 i-gain value can minimize the wear of the probe,thus effectively improving the service life of the probe.

关 键 词：原子力显微镜 超平表面 探针磨损 粗糙度 

分 类 号：TH742[机械工程—光学工程]