中红外光谱透射比标准物质研制  

Preparation of mid-infrared transmittance standard reference materials

作　　者：冯国进[1] 马宇轩 梁凤臣 甘海勇 郑春弟[1] 吴厚平[1] 张巧香[1] 刘子龙[1] FENG Guojin;MA Yuxuan;LIANG Fengchen;GAN Haiyong;ZHENG Chundi;WU Houping;ZHANG Qiaoxiang;LIU Zilong(National Institute of Metrology,Beijing 100013,China)

机构地区：[1]中国计量科学研究院

出　　处：《化学分析计量》2020年第1期1-3,共3页Chemical Analysis And Meterage

基　　金：国家重点研发专项(2016YFF0200303)

摘　　要：采用物化性质稳定的单晶硅作为基质,以直流磁控溅射方式轻蒸镀不同厚度的镍、铬混合膜层,实现了中红外波段(500~4000 cm^–1)不同透射比标准物质的研制。研制的中红外光谱透射比标准物质其透射比标称值分别为10%和50%,扩展不确定度优于0.008(k=2)。该标准物质具有量值稳定、光谱平坦等特点,可用于各类傅里叶变换红外光谱设备的透射比校准。Based on single crystal silicon substrate with stable physical and chemical properties,a series of transmittances in mid-infrared wave range of 500–4000 cm^–1 were achieved by coated with different thicknesses of Ni and Cr mixed film layers.The nominal values of the developed reference materials were 10%and 50%,respectively,and the expand uncertainty was better than 0.008(k=2).The reference material has the characteristics of stable value and flat spectrum,which can be used for the transmittance calibration of various Fourier transform infrared spectroscopy equipment.

关 键 词：透射比 单晶硅 中红外光谱 标准物质 

分 类 号：O652[理学—分析化学]