双芯半导体光纤的制备研究  

Research on Fabrication of Dual-core Semiconductor Optical Fiber

作　　者：刘笑东[1] 耿鹏程 武洋 LIU Xiaodong;GENG Pengcheng;WU Yang(46^th Research Institute,China Electronics Technology Group Corporation,Tianjin 300220,China)

机构地区：[1]中国电子科技集团公司第四十六研究所

出　　处：《天津科技》2020年第1期18-19,23,共3页Tianjin Science & Technology

基　　金：国家自然科学基金“非对称、异构型多芯光敏光纤及其矢量传感特性研究”(61405179)

摘　　要：半导体芯石英包层光纤同时具有光学特性和电学特性,故在光电集成器件、红外器件以及光纤传感等领域中均具有十分重要的应用前景,尤其是多芯半导体石英包层光纤可以将不同功能特性的半导体材料集成在同一根光纤之中,可进一步提高光电集成器件的一体化程度。基于打孔组装与半导体蒸气分区域处理等工艺,制备出了具有较高几何精度的硅-锗双芯石英包层半导体光纤,其包层不圆度为0.9%,硅-纤芯的不圆度为1.5%,锗-纤芯的不圆度为1.4%。Semiconductor core quartz cladding optical fiber has both optical and electrical properties.It has very important application prospects in the fields of optoelectronic integrated devices,infrared devices and optical fiber sensors.In particular,multi-core semiconductor quartz cladding optical fiber can integrate semiconductor materials with different functional characteristics into the same fiber,which can further improve the integration degree of optoelectronic integrated devices.Based on the process of punching assembly and semiconductor vapor partitioning,a silicon-germanium double core and quartz cladding semiconductor optical fiber with high geometric accuracy was prepared.The ellipticity of fiber cladding is 0.9%,the ellipticity of the silicon-core is 1.5%,and the ellipticity of the germanium core is 1.4%.

关 键 词：半导体光纤 光电集成 不圆度 

分 类 号：TN253[电子电信—物理电子学]