压电精密驱动功能部件的基础研究  

Fund amental Research of Piezoelectric Precision Driving Systems

作　　者：裘进浩[1] 董显林[2] 王齐华[3] 曲宁松[4] 范大鹏[5] 李华峰[1] 赵盖[1] 刘晓亮[1] Qiu Jinhao;Dong Xianlin;Wang Qihua;Qu Ningsong;Fan Dapeng;Li Huafeng;Zhao Gai;Liu Xiaoliang(State Key Laboratory of Mechanics and Control of Mechanical Structures,College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016;Key Laboratory of Inorganic Functional Materials and Devices,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 201899;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000;College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016;College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410073)

机构地区：[1]南京航空航天大学航空学院,机械结构力学及控制国家重点实验室,南京210016 [2]中国科学院上海硅酸盐研究所,中国科学院无机功能材料与器件重点实验室,上海201899 [3]中国科学院兰州化学物理研究所,固体润滑国家重点实验室,兰州730000 [4]南京航空航天大学航空学院,机电工程学院,南京210016 [5]国防科技大学,智能科学学院,长沙410073

出　　处：《中国基础科学》2019年第4期1-6,F0002,共7页China Basic Science

基　　金：研究资助:973计划项目(2015CB057500)。

摘　　要：精密驱动功能部件是高端装备的关键基础件,广泛应用于航空航天等领域,对国家的科技影响力和国防威慑力有着重要影响.在《国家中长期科学和技术发展规划纲要(2006—2020)》中,以"嫦娥系列探月工程"为代表的多个重大专项对精密驱动功能部件的轻量化、精密化和智能化等方面提出更高的要求.国家重点基础研究发展计划(973计划)"压电精密驱动功能部件的基础研究"项目围绕压电驱动功能部件(超声电机系统)的织构化接触界面的能量传递机理、压电器件和摩擦副的设计制造、系统的高精度控制3个方面的关键科学问题开展了系统深入的研究,并取得了一系列重要研究成果.本文从国内外研究现状和国家需求、关键科学问题、项目研究进展、总结与展望四部分进行论述.Precision driving functional system,as a key part of advanced equipment,had been widely used in aerospace and other fields.It played an important role on the development of science and technology,as well as national defense.In the outline of National Medium and Long-Term Science and Technology Development,there had higher requirements for lightweight,precision and intelligent precision drive system,for example,in the series projects of lunar exploration.National Key Basic Research Development Program(973 Program)"Fundamental Research of Piezoelectric Precision Driving Systems"systematically studied the energy transfer mechanisms,design and manufacture of piezoelectric device and frictional pairs,high precision control system of ultrasonic motors.A series of important research indicators were achieved in this program.This article will mainly introduce overseas and domestic research status of ultrasonic motors,major national requirements,key scientific issues,research progress,summary and outlook.

关 键 词：精密驱动功能部件 超声电机系统 能量传递机理 表面织构 

分 类 号：V19[航空宇航科学与技术—人机与环境工程] TB332[一般工业技术—材料科学与工程]