TiN/TiCN多层调制结构薄膜的结构和力学性能研究  

Study on Microstructure and Mechanical Properties of TiN/TiCN Multilayer Modulation Structure Films

作　　者：任鑫[1] 江仁康 赵瑞山[1] 王丞 黄美东 REN Xin;JIANG Renkang;ZHAO Ruishan;WANG Cheng;HUANG Meidong(College of Material Science and Engineering,Liaoning Technical University,Fuxin 123000,China;College of Physics and Material Science,Tianjin Normal University,Tianjin 300387,China)

机构地区：[1]辽宁工程技术大学材料科学与工程学院,辽宁阜新123000 [2]天津师范大学物理与材料科学学院,天津300387

出　　处：《有色金属工程》2019年第12期29-34,共6页Nonferrous Metals Engineering

基　　金：2016年辽宁省教育厅科学技术研究资助项目（LJYL007）~~

摘　　要：以304不锈钢为基体,利用复合离子镀技术制备了TiN/TiCN多层膜,主要研究了不同调制周期下薄膜组织结构和力学性能的变化规律。结果表明:不同调制周期下得到的TiN/TiCN多层膜表面比较致密、平整,随着调制周期的减小,表面质量有一定改善。多层膜结构主要由fcc-TiN型固溶体构成,不存在a-C结构。随着调制周期的减小,物相分析表明TiN/TiCN多层膜发生了择优生长,出现了(111)晶面生长织构,其纳米硬度和弹性模量逐渐增大,在调制周期λ=0.15μm时达到最大值,分别为35.56GPa和436.2GPa。TiN/TiCN multilayer films were deposited on substrate 304 stainless steel by composite ion plating,combining multi-arc ion plating and magnetron sputtering technique.The changes of microstructure and mechanical properties of the films under different modulation periods were mainly investigated.The results show that the surface of TiN/TiCN multilayer films as-deposited is dense and smooth under different modulation periods,and the surface quality is improved with the decrease of modulation period,.The multilayer film structure is mainly composed of fcc-TiN type solid solution,and there is no a-C structure.With the decrease of the modulation period,the phase analysis shows that the TiN/TiCN multilayer films has preferential growth.The(111)crystal growth texture appears,and its nanohardness and elastic modulus of the films increase gradually at the modulation periodλ=0.15μm,the maximum values of 35.56 GPa and 436.2 GPa,are reached,respectively.

关 键 词：TiN/TiCN多层膜薄膜 复合离子镀 调制周期 结构 力学性能 

分 类 号：TG174.[金属学及工艺—金属表面处理]