TiB_(2)-BN-AlN复相导电陶瓷蒸发舟性能影响因素研究进展  

Research progress on performance influencing factors of TiB_(2)-BN-AlN composite conductive ceramic evaporators

作　　者：史晓伟 白佳海[1] 王前 杜庆洋[1] 张雍 魏春城[1] Shi Xiaowei;Bai Jiahai;Wang Qian;Du Qingyang;Zhang Yong;Wei Chuncheng

机构地区：[1]山东理工大学材料科学与工程学院,山东淄博255049 [2]山东鹏程陶瓷新材料科技有限公司,山东淄博255000

出　　处：《耐火材料》2020年第1期77-81,共5页Refractories

基　　金：山东省自然科学基金资助项目(ZR2018MEM018);淄博校城融合计划支持项目(2017ZBXC059)

摘　　要：TiB_(2)-BN-AlN(简称TBA)复相陶瓷保持了TiB_(2)、BN、AlN的优良性能,具备优异的化学稳定性、力学性能以及一定的导电性,主要用作真空镀铝的蒸发容器和耐腐蚀电极等。因此,概述了TBA复相陶瓷作为导电陶瓷蒸发舟的一些研究进展,重点分析了影响其致密度、导电性、力学性能(抗弯强度)和使用寿命的工艺因素;同时讨论了TBA复相陶瓷蒸发舟仍存在的问题,并对其未来发展趋势进行了展望。Owning the excellent properties of TiB_(2),BN and AlN,TiB_(2)-BN-AlN(TBA)composite ceramics exhibit high chemical stability,good mechanical properties and certain electrical conductivity,which are mainly used as the evaporators and corrosion-resistant electrodes for vacuum aluminum plating.The research progress of using TBA composite ceramics as conductive ceramic evaporators was summarized,and the effects of technologies on the density,electrical conductivity,mechanical properties(bending strength)and service life were analyzed;meanwhile,the existing problems and the future prospects of the TBA conductive ceramic evaporators were discussed.

关 键 词：TiB_(2)-BN-AlN复相陶瓷 蒸发舟 导电陶瓷 致密度 导电性 抗弯强度 

分 类 号：TQ175[化学工程—硅酸盐工业]