PS-PVD等离子射流特性和YSZ粉末蒸发行为的光谱诊断  

Spectral diagnosis of PS-PVD plasma jet characteristics and evaporation behavior of YSZ powder

作　　者：张岩 邓畅光 毛杰 邓子谦 罗志伟[1] ZHANG Yan;DENG Changguang;MAO Jie;DENG Ziqian;LUO Zhiwei(School of Materials Science and Engineering,Central South University,Changsha 410083,China;Guangdong Institute of New Materials,National Engineering Laboratory for Modern Materials Surface Engineering Technology,The Key Lab of Guangdong for Modern Surface Engineering Technology,Guangzhou 510650,China)

机构地区：[1]中南大学材料科学与工程学院,湖南长沙410083 [2]广东省新材料研究所,现代材料表面工程技术国家工程实验室,广东省现代表面工程技术重点实验室,广东广州510650

出　　处：《材料研究与应用》2019年第4期287-294,共8页Materials Research and Application

基　　金：国家自然科学面上基金(51771059);广东省重点领域计划(2019B010936001);国家科技重大专项(2017-VI-0010-0081);广东省科技计划项目(2017A070701027,2014B070705007);广东省科学院项目(2019GDASYL-0104022,2018GDASCX-0950)

摘　　要：采用PS-PVD工艺在不同送粉速率下沉积YSZ陶瓷涂层,通过光学发射光谱(OES)对不同送粉速率下的等离子射流特性进行诊断,同时分析光谱发射强度分布并计算出等离子射流平均温度及电子密度值,结合射流照片以及涂层微观结构研究不同送粉速率下YSZ粉末在射流中的加热蒸发行为.研究结果表明:少量粉末通入后几乎全部被加热蒸发,大量处于高激发态甚至发生电离,射流温度较低但保持着较高电子密度;气相状态下涂层沉积速率很低,涂层多为单根柱状晶且宽大,直接由纳米柱状晶组成;增大粉末送粉速率,射流高温区发生宽化,粉末蒸发量提高,但射流的能量不再足以蒸发所有粉末,会存在少量未融颗粒.气相、团簇甚至熔融粒子共同作用下的混合相沉积使得沉积效率迅速增大.表面扩散较不充分,单根柱状晶尺寸变窄,在固体颗粒与阴影效应的共同作用下产生分支.The PS-PVD process was used to spray YSZ ceramic coatings at different powder feed rates with using optical emission spectroscopy(OES)to diagnose the plasma jet characteristics including analysis of spectral emission intensity distribution and calculation of plasma jet average temperature and electron density.Combined with the jet photographs and the coating microstructure to study the heating and evaporation behavior of YSZ powder in plasma jet at different powder feed rates.The results show that a small amount of powder is almost completely heated and evaporated after passing in,a large amount of that is in a highly excited state or even ionized.The jet temperature is low but the electron density is maintained.The vapor deposition rate is very low in the gas phase and the coating is mostly composed of a single columnar crystal,which are wide and directly composed of nano-columnar crystals.Increasing the powder feed rate,the high temperature region of the jet is widened with more powder evaporating.However,the energy of the jet is no longer sufficient to evaporate all the powder,and some unmelted particles will appear in the jet.The mixed deposition with vapor phase,clusters and even molten particles makes the deposition efficiency increase rapidly.The surface diffusion is difficult to make the size of the single columnar crystal narrow.Under the influence of solid particles and shadowing,columnar crystals generate a large number of branches.

关 键 词：OES PS-PVD 热障涂层 YSZ粉末蒸发 等离子射流特性 

分 类 号：TG174.453[金属学及工艺—金属表面处理]