基于点模式匹配的芯片缺陷检测算法研究  

Research on chip defect detection algorithm based on point pattern matching

作　　者：刘琛 袁小芳[1,2] 田争鸣 王浩然 LIU Chen;YUAN Xiaofang;TIAN Zhengming;WANG Haoran(College of Electrical and Information Engineering,Hunan University,Changsha 410082 China;National Engineering Laboratory of Robot Vision Perception and Control Technology,Hunan University,Changsha 410082,China)

机构地区：[1]湖南大学电气与信息工程学院,长沙410082 [2]机器人视觉感知与控制技术国家工程实验室,长沙410082

出　　处：《激光杂志》2020年第1期39-44,共6页Laser Journal

基　　金：国家重点研发计划项目(No.2017YFB1300900)

摘　　要：针对高速与高精度场景下芯片缺陷检测实时性和准确性难以同时保证的问题,提出一种基于方位环境特征的点模式匹配定位算法(Azimuth Environment Feature Vector-Based Point Pattern Matching Localization Algorithm,AEF-PPMLA),提升检测的实时性、准确性和易用性。该算法含两个部分:方位环境特征向量计算方法(Azimuthal Environment Feature Vector Calculator Method,AEF-VCM)和相似度计算方法 (Matching Degree Calculator Method,MDCM)。AEF-VCM对芯片的方位环境特征进行向量描述,减少点匹配的计算量,提高检测的实时性;MDCM采用卡方检验算法来度量特征向量的相似度,提高检测的准确度。实验部分验证算法的定位精度、耗时以及缺陷识别的准确率,结果表明所提出的AEF-PPMLA能够快速准确定位芯片并识别引脚缺陷,满足高质量生产需要。Aiming at the problems that the real-time and accuracy of chip defect detection are difficult to be simultaneously guaranteed in high-speed and high-precision scenes,this paper proposes an azimuth environment feature vector-based point pattern matching localization algorithm (AEF-PPMLA) which is applied to improve the real-time,accuracy and usability. The algorithm consists of two parts: azimuthal environment feature vector calculator method (AEF-VCM) and similarity calculator method (MDCM). AEF-VCM performs vector description on the azimuth environment characteristics of the chip,reduces the calculation of point matching,and improves real-time detection. MDCM uses chi-square test algorithm to measure the similarity of feature vectors and improve the accuracy of detection. The experimental part verifies the accuracy and time-consuming of the algorithm and the accuracy of defect recognition.The results show that the algorithm can quickly and accurately locate the chip and identify the pin defects,which meets the needs of high-speed and high-precision production.

关 键 词：机器视觉 缺陷检测 芯片定位 点模式匹配 方位环境特征 

分 类 号：TN209[电子电信—物理电子学]