原子力显微镜系统FAIT-PI控制器设计  

Design of FAIT-PI controller for atomic force microscope system

作　　者：张胜 许红梅[1] 尹耀庭 刘子瑜 Zhang Sheng;Xu Hongmei;Yin Yaoting;Liu Ziyu(School of Electronics and Information Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学电子信息工程学院

出　　处：《电子测量与仪器学报》2019年第11期169-177,共9页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金(61604018);吉林省青年科学基金(20160520101JH)资助项目

摘　　要：根据原子间相互力的作用通过原子力显微镜(AFM)可以获得纳米样品的三维形貌,为实现可靠的高精度AFM扫描成像必须对AFM系统进行精密控制。提出了一种模糊自适应闭环迭代学习算法来实现AFM系统中对样品形貌的动态精确跟踪,通过迭代学习获得的输入输出数据序列,采用最小二乘法拟合获得比例积分(PI)控制参数,利用整定后PI参数实现AFM系统扫描成像。实验结果表明,根据样品形貌整定的控制参数可以改善纳米样品的成像质量,进而提高纳米测量与操纵的精度。The true three-dimensional morphology of a nano sample can be obtained according to the interaction between atoms by AFM, in order to achieve reliable high-precision AFM scanning and imaging, precise control of the AFM system is required. In this paper, A fuzzy adaptive closed-loop iterative learning algorithm is proposed to achieve the dynamic and accurate tracking of sample morphology in AFM system. According to the learning input and output data sequences, using the least square method fitting the PI control parameters, using the PI parameters after tuning to control the normal scanning and imaging of the AFM system. The results show that the control parameters tuned according to the sample morphology can improve the imaging quality of nano sample, and thus improving the accuracy of nano-measurement and manipulation.

关 键 词：纳米测量 原子力显微镜 扫描成像 模糊自适应迭代控制 

分 类 号：TN98[电子电信—信息与通信工程]