有效改进屏蔽玻璃的翘曲度的工艺优化  

Process Optimization for Effectively Improving Warp Degree of Shielding Glass

作　　者：张贵恩[1] 吕德涛[1] 许晓丽[1] 常志广 王腾[1] ZHANG Gui-en;LV De-tao;XU Xiao-li;CHANG Zhi-guang;WANG Teng(Department of Electromagnetic Protective Materials Products,No.33 Institute of CETC,030032,Shanxi,China)

机构地区：[1]中国电子科技集团公司第33研究所,电磁防护材料产品部,山西太原030032

出　　处：《电子材料与电子技术》2019年第4期40-46,共7页Electronic Material & Electronic Technology

摘　　要：为了改进屏蔽玻璃的翘曲度,通过数据统计,分析了产品翘曲度超出的主要原因。从硅胶袋抽真空改为超薄聚酰亚胺袋抽真空,解决了屏蔽玻璃边缘受力过大的问题;从统一厚度气路改进为依据屏蔽玻璃厚度具体定制,解决了屏蔽玻璃与气路厚度不一致产生的压力差问题;重新编制了装炉作业指导书,明确了气路规格、气路摆放间距,规范了人员操作,解决了批次不一致性问题;通过以上措施,有效改进了屏蔽玻璃的翘曲度。To improve the warp degree of shielding glass,the main reason of the prtxluct warpage has been analyzed by statistics.Instead of silicone bag vacuuming,ultra-thin polyimide bag vacuuming solves the problem of excessive force on the edge of shielding glass;from the improvement of gas path with uniform thickness to the specific customization according to the thickness of the shielding glass,the pressure difference caused by inconsistent thickness between the shielding glass and gas path is solved;rrfbnnulated the operating instructions for lumace loading,clarified the gas path specifications and gas path spacing,standardized the operation of personnel,and solved the problem of batch inconsistency.

关 键 词：屏蔽玻璃 翘曲度 热复合 气路 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]