应用旋转法实现大口径非球面反射镜零重力面形加工  

Fabrication of zero-gravity surface for large-aperture aspherical mirror by using rotationally method

作　　者：孟晓辉[1] 王永刚[1] 李文卿[1] 陈建丞 周于鸣[1] 张继友[1] MENG Xiao-hui;WANG Yong-gang;LI Wen-qing;CHEN Jian-cheng;ZHOU Yu-ming;ZHANG Ji-you(Beijing Institute of Space Mechanics & Electricity, Optical Ultraprecise Processing Technology Innovation Center for Science and Technology Industry of National Defense, Beijing 100094, China)

机构地区：[1]北京空间机电研究所国防科技工业光学超精密加工技术创新中心(先进制造类)

出　　处：《光学精密工程》2019年第12期2517-2524,共8页Optics and Precision Engineering

基　　金：国防十三五技术基础科研计划资助项目（No.JSZL2017203B009）

摘　　要：为了在地面制造环境下实现大口径空间非球面反射镜的零重力面形加工,建立了基于重力卸载的高精度旋转检测工艺方法。首先对N次等间隔旋转法的基本原理进行了介绍,并结合一块Ф1290 mm ULE材料的非球面反射镜加工实例,分别给出了旋转法实施环节中的旋转角度和偏心误差控制方法,实际角度误差和偏心误差分别优于0.1°和0.1 mm。然后,在低精度阶段采用了3次旋转法对检测结果进行处理,主镜面形精度快速收敛至0.029λ-RMS;同时由于应用旋转法而导致镜面上的对称性误差累积放大,进行了针对性去除,面形精度进一步收敛至0.023λ-RMS。最后,采用了6次旋转法对检测结果进行处理并指导光学加工,反射镜6个方向下的实测面形精度为0.012λ-RMS,去除重力变形误差后面形精度达到了0.010λ-RMS,该面形可以认为是卫星入轨后零重力空间环境下的反射镜面形。文中所述加工工艺方法不仅适用于米级口径,还适用于更大口径空间非球面反射镜零重力面形的高精度加工。To acquire the zero-gravity surface figure error of an aspherical mirror in a ground fabricating environment,a high-precision rotation method based on gravity compensation technology was established.First,the basic principle of the N equal interval rotation method is introduced.Second,combined with an aspheric ultra low expansion(ULE)mirror with a diameter ofФ1290 mm processing,the rotation angle and off-center control methods are given,respectively,and the angle error and off-center error are better than 0.1°and 0.1 mm,respectively.Third,in the low-precision stage,the rotation result is processed by three-position rotations and the surface accuracy of the mirror quickly converges to 0.029λ-RMS.At the same time,the symmetry error on the mirror surface is cumulatively amplified due to the application of the rotation method.After removal,the surface accuracy further converges to 0.023λ-root mean square(RMS).Finally,the six-position rotations are used to guide the optical manufacturing.The surface figure error of the mirror in the six directions is 0.012λ-RMS and 0.010λ-RMS by removing the gravity deformation error,which allows it to be considered as a zero-gravity mirror in the space environment after the satellite is in orbit.The method described in the studyis not only applicable to the fabrication of one meter-level mirrors,but also to larger space aspheric mirrors with the goals of a zero-gravity surface figure error.

关 键 词：光学加工 光学检测 空间光学遥感器 非球面反射镜 零重力面形 

分 类 号：TH706[机械工程—仪器科学与技术]