酸碱度对磁流变抛光去除作用的调节机制  

Influence of pH value on removal effect of fused silica during magnetorheological finishing

作　　者：李晓媛[1] 叶敏恒 刘佳保 田东 张云飞[1] 董会[1] 王超[1] LI Xiao-yuan;YE Min-heng;LIU Jia-bao;TIAN Dong;ZHANG Yun-fei;DONG Hui;WANG Chao(Institute of Machinery Manufacturing Technology, Chinese Academy of Engineering Physics, Mianyang 621900, China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所

出　　处：《光学精密工程》2019年第12期2602-2608,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目（No.51575501）;核科学挑战计划（No.JCKY2016212A506-0504）;科技部04重大专项（No.2017ZX04022001）;中国工程物理研究院超精密加工技术重点实验室基金资助项目（No.K1155）

摘　　要：随着磁流变抛光技术在超精密加工领域的应用需求不断增长,提高该技术的抛光效率成为一种必然趋势。本文从研究磁流变抛光液料浆的性质出发,建立了以pH值调节为手段改善抛光液性能的实验方法。采用透射电镜、粒度分析,黏度测试和Zeta电位测试等实验分析表征了抛光颗粒的分散行为及料浆的流变特性,并对抛光料浆特性进行了研究和优化。结果表明当pH值为12时,抛光料浆具有绝对值最大的Zeta电位(33.28 mV)和最小的颗粒粒径(260 nm),获得了抛光颗粒分散均匀、悬浮性能稳定的料浆。使用该料浆抛光液与初始抛光液在相同工艺条件下对熔石英进行抛光。实验结果表明,在未明显恶化表面粗糙度的前提下,该抛光液的峰去除效率和体去除效率分别提升87%和66%,获得了良好、高效的去除效果。With increasing applications of Magnetorheological Finishing(MRF)in the field of ultra-precision manufacturing,enhancement of the efficiency of MRF is imperative.To address this requirement,a technique based on pH adjustment was developed in this paper,which in turn,optimized the properties of the polishing slurry.The dispersion behavior of polished particles and the rheological characteristics of the polishing slurry were investigated via scanning electron microscope,particle-size analysis,and Zeta potential test.The results demonstrate that an adjustable pH facilitates the dispersion of nanoparticles.A pH value of 12 has been identified to be the most suitable for the dispersion of the polishing particles.The absolute value of the Zeta potential is observed to be 33.28 mV and the particles diameter of D50 is detected to be 260 nm under this pH.After polishing of fused silica,the alkaline MRF fluid is demonstrated to not only lead to superior material removal rate,with the corresponding peak removal rate and volumetric removal rate increasing by 87%and 66%,respectively,but also achieve a precise level of surface roughness.

关 键 词：磁流变抛光 酸碱度 去除效率 粗糙度 熔石英 

分 类 号：TG580.692[金属学及工艺—金属切削加工及机床]