高重复频率准分子激光器中放电冲击波特性的实验研究  

Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers

作　　者：刘斌[1,2,3] 丁金滨 王魁波 周翊 江锐 王宇 Liu Bin;Ding Jinbin;Wang Kuibo;Zhou Yi;Jiang Rui;Wang Yub(Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Beijing RSLaser Opto-Electronics Technology Co.,Ltd.,Beijing 100176,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049 [3]北京科益虹源光电技术有限公司,北京100176

出　　处：《中国激光》2019年第12期18-25,共8页Chinese Journal of Lasers

基　　金：国家科技重大专项(2013ZX02202002)

摘　　要：采用阴影法对高重复频率准分子激光器放电腔内的放电冲击波现象进行了实验研究,研究结果揭示了放电冲击波的产生以及演化过程。通过对观测结果进行分析,获得了放电冲击波的3种典型形式:横向冲击波、纵向冲击波(主电极冲击波)和预电离冲击波。估算了3种冲击波的波速,进而分析了可会受冲击波影响的重复频率。研究成果可以为高重复频率准分子放电腔的设计提供支持,尤其是可以在放电冲击波抑制结构的设计方面提供支持。The characteristics of the discharge shock waves in high-repetition-rate excimer laser discharge chambers are experimentally investigated using the shadow method. This results represent the generation and evolution of the discharge shock waves. Thus, three typical forms of discharge shock waves, i.e., transverse, longitudinal(the main electrode shock wave), and preionization shock waves, are obtained. Further, the velocities of these shock waves are estimated, and the repetition rate at which the shock waves may effect the discharge is analyzed. The results of this study support the design of discharge-shock-wave suppression devices in high-repetition-rate discharge chambers.

关 键 词：激光光学 准分子激光器 高重复频率 放电腔 放电冲击波 阴影法 

分 类 号：TN24&2[电子电信—物理电子学]